Optical Characterization of Fabry-Pérot MEMS Filters Integrated on Tunable Short-Wave IR Detectors

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Abstract

Optical characterization of a microspectrometer based on a voltage tunable Fabry-Pérot microelectromechanical optical filter monolithically integrated on a HgxCd1-xTe infrared (IR) photoconductor is presented. Wavelength tuning from 1.7 to 2.35 μm (650 nm) with less than 9 V is demonstrated. Bandwidths of less than 55±5 nm and switching times of 60±10 μs have been achieved. Requirements to reduce the optical bandwidth and extend the tunable range are discussed. This technology has potential applications in hyperspectral imaging and spectroscopy across the entire IR band from 1 to 12 μm.
Original languageEnglish
Pages (from-to)1079-1081
JournalIEEE Photonics Technology Letters
Volume18
Issue number9
DOIs
Publication statusPublished - 2006

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