On-chip read-out of picomechanical motion under ambient conditions

    Research output: Contribution to journalArticle

    9 Citations (Scopus)
    278 Downloads (Pure)

    Abstract

    © The Royal Society of Chemistry 2015. Monitoring the nanomechanical movement of suspended cantilever structures has found use in applications ranging from biological/chemical sensing to atomic force microscopy. Interrogating these sensors relies on the ability to accurately determine the sub-nanometre movements of the cantilever. Here we investigate a technique based on the combination of integrated silicon photonics and microelectromechanical systems (MEMS) to create an optically resonant microcavity and demonstrate its use for monitoring of the position of cantilevers on the picometer scale under ambient conditions with dynamic range extending over several microns. The technique is interferometric, and we show it to be sufficiently sensitive to measure both the first and second modes of cantilever Brownian motion. We anticipate that application of this technique will provide a physically robust, picometer precision, integrated cantilever movement read-out technology which can take cantilever sensors from laboratory controlled environments into real world conditions, allowing everyday applications.
    Original languageEnglish
    Pages (from-to)1927-1933
    JournalNanoscale
    Volume7
    Issue number5
    DOIs
    Publication statusPublished - 7 Feb 2015

    Fingerprint

    Microcavities
    Monitoring
    Brownian movement
    Sensors
    Silicon
    Photonics
    MEMS
    Atomic force microscopy

    Cite this

    @article{65dc2706878242fea2d2c246c8c1c2bf,
    title = "On-chip read-out of picomechanical motion under ambient conditions",
    abstract = "{\circledC} The Royal Society of Chemistry 2015. Monitoring the nanomechanical movement of suspended cantilever structures has found use in applications ranging from biological/chemical sensing to atomic force microscopy. Interrogating these sensors relies on the ability to accurately determine the sub-nanometre movements of the cantilever. Here we investigate a technique based on the combination of integrated silicon photonics and microelectromechanical systems (MEMS) to create an optically resonant microcavity and demonstrate its use for monitoring of the position of cantilevers on the picometer scale under ambient conditions with dynamic range extending over several microns. The technique is interferometric, and we show it to be sufficiently sensitive to measure both the first and second modes of cantilever Brownian motion. We anticipate that application of this technique will provide a physically robust, picometer precision, integrated cantilever movement read-out technology which can take cantilever sensors from laboratory controlled environments into real world conditions, allowing everyday applications.",
    author = "Gino Putrino and Mariusz Martyniuk and Adrian Keating and Lorenzo Faraone and John Dell",
    year = "2015",
    month = "2",
    day = "7",
    doi = "10.1039/c4nr05419a",
    language = "English",
    volume = "7",
    pages = "1927--1933",
    journal = "Nanoscale",
    issn = "2040-3364",
    publisher = "ROYAL SOC CHEMISTRY",
    number = "5",

    }

    TY - JOUR

    T1 - On-chip read-out of picomechanical motion under ambient conditions

    AU - Putrino, Gino

    AU - Martyniuk, Mariusz

    AU - Keating, Adrian

    AU - Faraone, Lorenzo

    AU - Dell, John

    PY - 2015/2/7

    Y1 - 2015/2/7

    N2 - © The Royal Society of Chemistry 2015. Monitoring the nanomechanical movement of suspended cantilever structures has found use in applications ranging from biological/chemical sensing to atomic force microscopy. Interrogating these sensors relies on the ability to accurately determine the sub-nanometre movements of the cantilever. Here we investigate a technique based on the combination of integrated silicon photonics and microelectromechanical systems (MEMS) to create an optically resonant microcavity and demonstrate its use for monitoring of the position of cantilevers on the picometer scale under ambient conditions with dynamic range extending over several microns. The technique is interferometric, and we show it to be sufficiently sensitive to measure both the first and second modes of cantilever Brownian motion. We anticipate that application of this technique will provide a physically robust, picometer precision, integrated cantilever movement read-out technology which can take cantilever sensors from laboratory controlled environments into real world conditions, allowing everyday applications.

    AB - © The Royal Society of Chemistry 2015. Monitoring the nanomechanical movement of suspended cantilever structures has found use in applications ranging from biological/chemical sensing to atomic force microscopy. Interrogating these sensors relies on the ability to accurately determine the sub-nanometre movements of the cantilever. Here we investigate a technique based on the combination of integrated silicon photonics and microelectromechanical systems (MEMS) to create an optically resonant microcavity and demonstrate its use for monitoring of the position of cantilevers on the picometer scale under ambient conditions with dynamic range extending over several microns. The technique is interferometric, and we show it to be sufficiently sensitive to measure both the first and second modes of cantilever Brownian motion. We anticipate that application of this technique will provide a physically robust, picometer precision, integrated cantilever movement read-out technology which can take cantilever sensors from laboratory controlled environments into real world conditions, allowing everyday applications.

    U2 - 10.1039/c4nr05419a

    DO - 10.1039/c4nr05419a

    M3 - Article

    VL - 7

    SP - 1927

    EP - 1933

    JO - Nanoscale

    JF - Nanoscale

    SN - 2040-3364

    IS - 5

    ER -