Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon

E.R. Weppelmann, Xiao Hu, M.V. Swain

    Research output: Contribution to journalArticle

    22 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)611-624
    JournalJournal of Adhesion Science and Technology
    Volume8
    Issue number6
    Publication statusPublished - 1994

    Cite this

    @article{1174e2b92d76475aa35b4ca4ec395234,
    title = "Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon",
    author = "E.R. Weppelmann and Xiao Hu and M.V. Swain",
    year = "1994",
    language = "English",
    volume = "8",
    pages = "611--624",
    journal = "Journal of Adhesion Science and Technology",
    issn = "0169-4243",
    publisher = "Taylor & Francis",
    number = "6",

    }

    Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon. / Weppelmann, E.R.; Hu, Xiao; Swain, M.V.

    In: Journal of Adhesion Science and Technology, Vol. 8, No. 6, 1994, p. 611-624.

    Research output: Contribution to journalArticle

    TY - JOUR

    T1 - Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon

    AU - Weppelmann, E.R.

    AU - Hu, Xiao

    AU - Swain, M.V.

    PY - 1994

    Y1 - 1994

    M3 - Article

    VL - 8

    SP - 611

    EP - 624

    JO - Journal of Adhesion Science and Technology

    JF - Journal of Adhesion Science and Technology

    SN - 0169-4243

    IS - 6

    ER -