Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon

E.R. Weppelmann, Xiao Hu, M.V. Swain

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	611-624
Journal	Journal of Adhesion Science and Technology
Volume	8
Issue number	6
Publication status	Published - 1994

Cite this

@article{1174e2b92d76475aa35b4ca4ec395234,

title = "Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon",

author = "E.R. Weppelmann and Xiao Hu and M.V. Swain",

year = "1994",

language = "English",

volume = "8",

pages = "611--624",

journal = "Journal of Adhesion Science and Technology",

issn = "0169-4243",

publisher = "Taylor & Francis",

number = "6",

}