| Original language | English |
|---|---|
| Pages (from-to) | 611-624 |
| Journal | Journal of Adhesion Science and Technology |
| Volume | 8 |
| Issue number | 6 |
| Publication status | Published - 1994 |
Cite this
Weppelmann, E. R., Hu, X., & Swain, M. V. (1994). Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon. Journal of Adhesion Science and Technology, 8(6), 611-624.
@article{1174e2b92d76475aa35b4ca4ec395234,
title = "Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon",
author = "E.R. Weppelmann and Xiao Hu and M.V. Swain",
year = "1994",
language = "English",
volume = "8",
pages = "611--624",
journal = "Journal of Adhesion Science and Technology",
issn = "0169-4243",
publisher = "Taylor & Francis",
number = "6",
}
Weppelmann, ER, Hu, X & Swain, MV 1994, 'Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon' Journal of Adhesion Science and Technology, vol. 8, no. 6, pp. 611-624.
Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon. / Weppelmann, E.R.; Hu, Xiao; Swain, M.V.
In: Journal of Adhesion Science and Technology, Vol. 8, No. 6, 1994, p. 611-624.Research output: Contribution to journal › Article
TY - JOUR
T1 - Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon
AU - Weppelmann, E.R.
AU - Hu, Xiao
AU - Swain, M.V.
PY - 1994
Y1 - 1994
M3 - Article
VL - 8
SP - 611
EP - 624
JO - Journal of Adhesion Science and Technology
JF - Journal of Adhesion Science and Technology
SN - 0169-4243
IS - 6
ER -
Weppelmann ER, Hu X, Swain MV. Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon. Journal of Adhesion Science and Technology. 1994;8(6):611-624.