Observations and Sample Fracture Mechanics Analysis of Indentation Fracture Delamination of TiN films on Silicon

E.R. Weppelmann, Xiao Hu, M.V. Swain

Research output: Contribution to journalArticle

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)611-624
JournalJournal of Adhesion Science and Technology
Volume8
Issue number6
Publication statusPublished - 1994

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