NBTI and hot-carrier effects in accumulation-mode Pi-gate pMOSFETs

Chi-Woo Lee, Isabelle Ferain, Aryan Afzalian, Ran Yan, Nima Dehdashti, Pedram Razavi, Jean-Pierre Colinge, Jong Tae Park

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Negative bias temperature instability (NBTI) and hot-carrier induced device degradation in accumulation-mode Pi-gate pMOSFETs have been studied for different fin widths ranging from 20 to 40 nm. The NBTI induced device degradation is more significant in narrow devices. This result can be explained by enhanced diffusion of hydrogen at the corners in multiple-gate devices. Due to larger impact ionization, hot-carrier induced device degradation is more significant in wider devices. Finally, hot-carrier induced device degradation rate is highest under stress conditions where V(Gs) = V(TH). (C) 2009 Elsevier Ltd. All rights reserved.

Original languageEnglish
Pages (from-to)1044-1047
Number of pages4
JournalMicroelectronics Reliability
Volume49
Issue number9-11
DOIs
Publication statusPublished - 2009
Event20th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - Arcachon, France
Duration: 5 Oct 20099 Oct 2009

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