Nano-porous silicon stress study during microstructure fabrication processes

Research output: Contribution to conference › Conference presentation/ephemera › peer-review

Original language	English
Publication status	Published - 2016
Event	International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia Duration: 7 Feb 2016 → 11 Feb 2016

Conference	International Conference on Nanoscience and Nanotechnology (ICONN 2016)
Country/Territory	Australia
City	Canberra
Period	7/02/16 → 11/02/16

Cite this

@conference{05f2343baf8346789d4eb60ed5fc8bae,

title = "Nano-porous silicon stress study during microstructure fabrication processes",

author = "Xiao Sun and Adrian Keating and Giacinta Parish",

year = "2016",

language = "English",

note = " International Conference on Nanoscience and Nanotechnology (ICONN 2016) ; Conference date: 07-02-2016 Through 11-02-2016",

}