Nano-Indentation Characterisation Of PECVD Silicon Nitride Films

K.J. Winchester, John Dell

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of the Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2000)
EditorsLeonard D. Broekman, Brian F. Usher, John D. Riley
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages117-120
Volume1
EditionLa Trobe University, Melbourne
ISBN (Print)0780366980
Publication statusPublished - 2002
EventNano-Indentation Characterisation Of PECVD Silicon Nitride Films - La Trobe University, Melbourne
Duration: 1 Jan 2002 → …

Conference

ConferenceNano-Indentation Characterisation Of PECVD Silicon Nitride Films
Period1/01/02 → …

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