Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

Charlie C. Musca, J. Antoszewski, K. J. Winchester, A. J. Keating, T. Nguyen, K. K.M.B.D. Silva, J. M. Dell, L. Faraone, P. Mitra, J. D. Beck, M. R. Skokan, J. E. Robinson

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