@inproceedings{29d2aa2493384ca5ad29239682d1f03a,
title = "Modelling of damping characteristics in silicon-gold bilayer cantilevers",
abstract = "This paper presents a simple method to extract the damping ratio of bilayer cantilevers using the static deflection profile of the released cantilevers. The extracted damping ratio is used to build a second order dynamical model of the cantilever. The model is validated by comparing the measured step response with the response predicted by the second order dynamical model.",
author = "V. Chenniappan and Silva, {K. K.M.B.D.} and Umana-Membreno, {G. A.} and M. Martyniuk and A. Keating and Dell, {J. M.} and L. Faraone",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/COMMAD.2018.8715248",
language = "English",
series = "Conference on Optoelectronic and Microelectronic Materials and Devices",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
pages = "5--6",
booktitle = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
address = "United States",
note = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 ; Conference date: 09-12-2018 Through 13-12-2018",
}