TY - CONF
T1 - Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems
AU - Gill, Gurpreet Singh
AU - Zawierta, Michal
AU - Tripathi, Dhirendra Kumar
AU - Martyniuk, Mariusz
AU - Dilusha Silva, K.K. M.B.
AU - Putrino, Gino
AU - Keating, Adrian
AU - Faraone, Lorenzo
PY - 2018/7/2
Y1 - 2018/7/2
UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems
UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems
U2 - 10.1109/commad.2018.8715250
DO - 10.1109/commad.2018.8715250
M3 - Conference presentation/ephemera
SP - 7
EP - 10
ER -