Original language | English |
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Number of pages | 4 |
DOIs | |
Publication status | Published - 16 May 2019 |
Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems
Gurpreet Singh Gill, Michal Zawierta, Dhirendra Kumar Tripathi, Mariusz Martyniuk, K.K. M.B. Dilusha Silva, Gino Putrino, Adrian Keating, Lorenzo Faraone
Research output: Contribution to conference › Conference presentation/ephemera › peer-review