Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gurpreet Singh Gill, Michal Zawierta, Dhirendra Kumar Tripathi, Mariusz Martyniuk, K.K. M.B. Dilusha Silva, Gino Putrino, Adrian Keating, Lorenzo Faraone

Research output: Contribution to conference › Conference presentation/ephemera

Original languageEnglish
Number of pages4
DOIs
Publication statusPublished - 16 May 2019

Cite this

Gill, Gurpreet Singh ; Zawierta, Michal ; Tripathi, Dhirendra Kumar ; Martyniuk, Mariusz ; Dilusha Silva, K.K. M.B. ; Putrino, Gino ; Keating, Adrian ; Faraone, Lorenzo. / Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems. 4 p.
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author = "Gill, {Gurpreet Singh} and Michal Zawierta and Tripathi, {Dhirendra Kumar} and Mariusz Martyniuk and {Dilusha Silva}, {K.K. M.B.} and Gino Putrino and Adrian Keating and Lorenzo Faraone",
year = "2019",
month = "5",
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Gill, GS, Zawierta, M, Tripathi, DK, Martyniuk, M, Dilusha Silva, KKMB, Putrino, G, Keating, A & Faraone, L 2019, 'Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems'. https://doi.org/10.1109/commad.2018.8715250

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems. / Gill, Gurpreet Singh; Zawierta, Michal; Tripathi, Dhirendra Kumar; Martyniuk, Mariusz; Dilusha Silva, K.K. M.B.; Putrino, Gino; Keating, Adrian; Faraone, Lorenzo.

2019.

Research output: Contribution to conference › Conference presentation/ephemera

TY - CONF

T1 - Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

AU - Gill, Gurpreet Singh

AU - Zawierta, Michal

AU - Tripathi, Dhirendra Kumar

AU - Martyniuk, Mariusz

AU - Dilusha Silva, K.K. M.B.

AU - Putrino, Gino

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2019/5/16

Y1 - 2019/5/16

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

U2 - 10.1109/commad.2018.8715250

DO - 10.1109/commad.2018.8715250

M3 - Conference presentation/ephemera

ER -

Gill GS, Zawierta M, Tripathi DK, Martyniuk M, Dilusha Silva KKMB, Putrino G et al. Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems. 2019. https://doi.org/10.1109/commad.2018.8715250

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