Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gurpreet Singh Gill; Michal Zawierta; Dhirendra Kumar Tripathi; Mariusz Martyniuk; K.K. M.B. Dilusha Silva; Gino Putrino; Adrian Keating; Lorenzo Faraone

doi:10.1109/commad.2018.8715250

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gurpreet Singh Gill, Michal Zawierta, Dhirendra Kumar Tripathi, Mariusz Martyniuk, K.K. M.B. Dilusha Silva, Gino Putrino, Adrian Keating, Lorenzo Faraone

Research output: Contribution to conference › Conference presentation/ephemera › peer-review

Original language	English
Number of pages	4
DOIs	https://doi.org/10.1109/commad.2018.8715250
Publication status	Published - 16 May 2019

Access to Document

10.1109/commad.2018.8715250

Cite this

@conference{f278a7d5679c40409282812565e5f97c,

title = "Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems",

author = "Gill, {Gurpreet Singh} and Michal Zawierta and Tripathi, {Dhirendra Kumar} and Mariusz Martyniuk and {Dilusha Silva}, {K.K. M.B.} and Gino Putrino and Adrian Keating and Lorenzo Faraone",

year = "2019",

month = may,

day = "16",

doi = "10.1109/commad.2018.8715250",

language = "English",

}

TY - CONF

T1 - Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

AU - Gill, Gurpreet Singh

AU - Zawierta, Michal

AU - Tripathi, Dhirendra Kumar

AU - Martyniuk, Mariusz

AU - Dilusha Silva, K.K. M.B.

AU - Putrino, Gino

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2019/5/16

Y1 - 2019/5/16

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

U2 - 10.1109/commad.2018.8715250

DO - 10.1109/commad.2018.8715250

M3 - Conference presentation/ephemera

ER -

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Access to Document

Other files and links

Cite this