Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Research output: Contribution to conferenceConference presentation/ephemera

Original languageEnglish
Number of pages4
DOIs
Publication statusPublished - 16 May 2019

Cite this

@conference{f278a7d5679c40409282812565e5f97c,
title = "Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems",
author = "Gill, {Gurpreet Singh} and Michal Zawierta and Tripathi, {Dhirendra Kumar} and Mariusz Martyniuk and {Dilusha Silva}, {K.K. M.B.} and Gino Putrino and Adrian Keating and Lorenzo Faraone",
year = "2019",
month = "5",
day = "16",
doi = "10.1109/commad.2018.8715250",
language = "English",

}

TY - CONF

T1 - Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

AU - Gill, Gurpreet Singh

AU - Zawierta, Michal

AU - Tripathi, Dhirendra Kumar

AU - Martyniuk, Mariusz

AU - Dilusha Silva, K.K. M.B.

AU - Putrino, Gino

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2019/5/16

Y1 - 2019/5/16

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

U2 - 10.1109/commad.2018.8715250

DO - 10.1109/commad.2018.8715250

M3 - Conference presentation/ephemera

ER -