Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gurpreet Singh Gill; Michal Zawierta; Dhirendra Kumar Tripathi; Mariusz Martyniuk; K.K. M.B. Dilusha Silva; Gino Putrino; Adrian Keating; Lorenzo Faraone

doi:10.1109/commad.2018.8715250

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gurpreet Singh Gill, Michal Zawierta, Dhirendra Kumar Tripathi, Mariusz Martyniuk, K.K. M.B. Dilusha Silva, Gino Putrino, Adrian Keating, Lorenzo Faraone

Research output: Contribution to conference › Conference presentation/ephemera › peer-review

1 Citation (Scopus)

Original language	English
Pages	7-10
Number of pages	4
DOIs	https://doi.org/10.1109/commad.2018.8715250
Publication status	Published - 2 Jul 2018

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10.1109/commad.2018.8715250

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title = "Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems",

author = "Gill, {Gurpreet Singh} and Michal Zawierta and Tripathi, {Dhirendra Kumar} and Mariusz Martyniuk and {Dilusha Silva}, {K.K. M.B.} and Gino Putrino and Adrian Keating and Lorenzo Faraone",

year = "2018",

month = jul,

day = "2",

doi = "10.1109/commad.2018.8715250",

language = "English",

pages = "7--10",

}

TY - CONF

T1 - Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

AU - Gill, Gurpreet Singh

AU - Zawierta, Michal

AU - Tripathi, Dhirendra Kumar

AU - Martyniuk, Mariusz

AU - Dilusha Silva, K.K. M.B.

AU - Putrino, Gino

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2018/7/2

Y1 - 2018/7/2

UR - http://www.mendeley.com/research/modelling-fabrication-antistiction-features-electrostatically-actuated-microsystems

U2 - 10.1109/commad.2018.8715250

DO - 10.1109/commad.2018.8715250

M3 - Conference presentation/ephemera

SP - 7

EP - 10

ER -

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

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ADHOC - Ad Hoc Postgraduate Scholarship

Scholarship for International Research Fees (SIRF)

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Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

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Other files and links

Prizes

ADHOC - Ad Hoc Postgraduate Scholarship

Scholarship for International Research Fees (SIRF)

Cite this