@inproceedings{ad982c78a6554da38917700d5f98afcd,
title = "Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications",
abstract = "In this work we present the theoretical optical modelling of full width at half maximum and free spectral range of the microelectromechanical systems (MEMS) based based Fabry Perot filters. These filters use silicon and silicon oxide based distributed Bragg reflectors. We also show the impact of variation of silicon thin film properties and structural deformation on the performance of filters. Finally we present fabrication and optical characterization of the fixed cavity SWIR wavelength range FP filters. The fabricated filters showed 39 nm FWHM and above 80% transmittance.",
author = "Tripathi, {Dhirendra Kumar} and Hemendra Kala and Silva, {K. K.M.B.Dilusha} and Mariusz Martyniuk and Gino Putrino and Brett Nener and Lorenzo Faraone",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/COMMAD.2018.8715253",
language = "English",
series = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
pages = "43--46",
booktitle = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
address = "United States",
note = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 ; Conference date: 09-12-2018 Through 13-12-2018",
}