Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications

Research output: Chapter in Book/Conference paperConference paper

Abstract

In this work we present the theoretical optical modelling of full width at half maximum and free spectral range of the microelectromechanical systems (MEMS) based based Fabry Perot filters. These filters use silicon and silicon oxide based distributed Bragg reflectors. We also show the impact of variation of silicon thin film properties and structural deformation on the performance of filters. Finally we present fabrication and optical characterization of the fixed cavity SWIR wavelength range FP filters. The fabricated filters showed 39 nm FWHM and above 80% transmittance.

Original languageEnglish
Title of host publication2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages43-46
Number of pages4
ISBN (Electronic)9781538695241
DOIs
Publication statusPublished - 14 May 2019
Event2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 - Perth, Australia
Duration: 9 Dec 201813 Dec 2018

Publication series

Name2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018

Conference

Conference2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
CountryAustralia
CityPerth
Period9/12/1813/12/18

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