Modeling and real-time control of multi-zone thermal processing system for photoresist processing

A. Tay, Hui Chua, Y. Wang, G. Yang, W. K. Ho

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)4805-4814
JournalIndustrial & Engineering Chemistry Research
Volume15
Issue number13
DOIs
Publication statusPublished - 2013

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