Mobility spectrum techniques for characterising multi-layer semiconductor structures

Charles Musca, T. Nguyen, Jarek Antoszewski, D.A. Redfern, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paperpeer-review

Original languageEnglish
Title of host publicationSPIE Proceedings on Design, Characterization, and Packaging for MEMS and Microelectronics II
EditorsP.D. Franzon
Place of PublicationAdelaide, South Australia
PublisherSPIE
Pages314-321
Volume4593
EditionAdelaide, South Australia
ISBN (Print)0819443239
Publication statusPublished - 2001
EventMobility spectrum techniques for characterising multi-layer semiconductor structures - Adelaide, South Australia
Duration: 1 Jan 2001 → …

Conference

ConferenceMobility spectrum techniques for characterising multi-layer semiconductor structures
Period1/01/01 → …

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