Micromachining to achieve low stress in sacrificial layer free, all-porous silicon microstructures

Research output: Contribution to conference › Conference presentation/ephemera

Original language	English
Publication status	Published - 2016
Event	Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 - Kanazawa, Kanazawa, Japan Duration: 26 Jun 2016 → 29 Jun 2016 http://apcot2016.org/

Conference	Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
Country/Territory	Japan
City	Kanazawa
Period	26/06/16 → 29/06/16
Internet address	http://apcot2016.org/

Cite this

@conference{48b646a5237146caa7008276e7b765aa,

title = "Micromachining to achieve low stress in sacrificial layer free, all-porous silicon microstructures",

author = "Xiao Sun and Adrian Keating and Giacinta Parish",

year = "2016",

language = "English",

note = "Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 ; Conference date: 26-06-2016 Through 29-06-2016",

url = "http://apcot2016.org/",

}