Micromachining to achieve low stress in sacrificial layer free, all-porous silicon microstructures

Research output: Contribution to conferenceConference presentation/ephemera

Original languageEnglish
Publication statusPublished - 2016
EventAsia-Pacific Conference of Transducers and Micro-Nano Technology - Kanazawa, Kanazawa, Japan
Duration: 26 Jun 201629 Jun 2016
http://apcot2016.org/

Conference

ConferenceAsia-Pacific Conference of Transducers and Micro-Nano Technology
CountryJapan
CityKanazawa
Period26/06/1629/06/16
Internet address

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