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Micromachining Based On Porous Silicon
Xiao Sun
Graduate Research School
Research output
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Thesis
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Doctoral Thesis
445
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Dive into the research topics of 'Micromachining Based On Porous Silicon'. Together they form a unique fingerprint.
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Engineering
Porous Silicon
100%
Micro Machining
100%
Resonant Frequency
16%
Microstructure
16%
Porosity
16%
Stress Gradient
16%
Residual Stress
16%
Microelectromechanical System
16%