Micromachining Based On Porous Silicon

Research output: ThesisDoctoral Thesis

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Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS). All-PS microstructures were successfully released and characterised. Residual stress in PS films under various treatments was investigated, and corresponding stress tuning methods were studied. Vertical stress gradient tuning was applied along with the previously established micromachining processes in order to achieve flat stable devices. Subsequently a high resonant frequency was measured for released PS microbeams fabricated with the established processes. Vapour sensing was successfully carried out with released PS cantilevers and doubly clamped microbeams.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • The University of Western Australia
  • Keating, Adrian, Supervisor
  • Parish, Gia, Supervisor
Award date11 Oct 2016
Publication statusUnpublished - 2016


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