Micromachining Based On Porous Silicon

    Research output: ThesisDoctoral Thesis

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    Abstract

    Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS). All-PS microstructures were successfully released and characterised. Residual stress in PS films under various treatments was investigated, and corresponding stress tuning methods were studied. Vertical stress gradient tuning was applied along with the previously established micromachining processes in order to achieve flat stable devices. Subsequently a high resonant frequency was measured for released PS microbeams fabricated with the established processes. Vapour sensing was successfully carried out with released PS cantilevers and doubly clamped microbeams.
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • The University of Western Australia
    Award date11 Oct 2016
    Publication statusUnpublished - 2016

    Fingerprint

    micromachining
    porous silicon
    microbeams
    tuning
    silicon films
    microelectromechanical systems
    residual stress
    resonant frequencies
    vapors
    porosity
    gradients
    microstructure

    Cite this

    @phdthesis{37a92ea1e8d341d5bac489e90dcc74fe,
    title = "Micromachining Based On Porous Silicon",
    abstract = "Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS). All-PS microstructures were successfully released and characterised. Residual stress in PS films under various treatments was investigated, and corresponding stress tuning methods were studied. Vertical stress gradient tuning was applied along with the previously established micromachining processes in order to achieve flat stable devices. Subsequently a high resonant frequency was measured for released PS microbeams fabricated with the established processes. Vapour sensing was successfully carried out with released PS cantilevers and doubly clamped microbeams.",
    keywords = "Porous silicon, Microelectromechanical systems, Fabrication, Stress, Annealing, Release",
    author = "Xiao Sun",
    year = "2016",
    language = "English",
    school = "The University of Western Australia",

    }

    Sun, X 2016, 'Micromachining Based On Porous Silicon', Doctor of Philosophy, The University of Western Australia.

    Micromachining Based On Porous Silicon. / Sun, Xiao.

    2016.

    Research output: ThesisDoctoral Thesis

    TY - THES

    T1 - Micromachining Based On Porous Silicon

    AU - Sun, Xiao

    PY - 2016

    Y1 - 2016

    N2 - Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS). All-PS microstructures were successfully released and characterised. Residual stress in PS films under various treatments was investigated, and corresponding stress tuning methods were studied. Vertical stress gradient tuning was applied along with the previously established micromachining processes in order to achieve flat stable devices. Subsequently a high resonant frequency was measured for released PS microbeams fabricated with the established processes. Vapour sensing was successfully carried out with released PS cantilevers and doubly clamped microbeams.

    AB - Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS). All-PS microstructures were successfully released and characterised. Residual stress in PS films under various treatments was investigated, and corresponding stress tuning methods were studied. Vertical stress gradient tuning was applied along with the previously established micromachining processes in order to achieve flat stable devices. Subsequently a high resonant frequency was measured for released PS microbeams fabricated with the established processes. Vapour sensing was successfully carried out with released PS cantilevers and doubly clamped microbeams.

    KW - Porous silicon

    KW - Microelectromechanical systems

    KW - Fabrication

    KW - Stress

    KW - Annealing

    KW - Release

    M3 - Doctoral Thesis

    ER -