Micromachined microbeams made from porous silicon for dynamic and static mode sensing

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    Abstract

    Through a controlled variation of the applied current during porous silicon formation, newly developed processes enable previously unattainable structural integrity of all-mesoporous silicon microelectromechanical systems (MEMS) structures. Such structures are desirable for applications such as sensing where the large surface area and low Young's modulus of the high porosity layer enable ultra-high sensitivity detection of adsorbed species. In this work, micromachined all-mesoporous silicon microbeams were released, allowing both the dynamic and static sensing modes to be studied using such porous structures. Resonant frequencies (50–250 kHz) of released doubly clamped porous silicon microbeams were measured, allowing mechanical properties to be extracted. Static mode sensing of vapour at the 1100 ppm level was also performed, with the released porous silicon cantilevers showing a significant 6.5 μm (3.7% of a 175 μm beam length) and repeatable deflection after exposure.

    Original languageEnglish
    Pages (from-to)91-98
    Number of pages8
    JournalSensors and Actuators, A: Physical
    Volume269
    DOIs
    Publication statusPublished - 1 Jan 2018

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    microbeams
    Porous silicon
    porous silicon
    Silicon
    Structural integrity
    MEMS
    Natural frequencies
    silicon
    Porosity
    Elastic moduli
    Vapors
    integrity
    microelectromechanical systems
    resonant frequencies
    deflection
    Mechanical properties
    modulus of elasticity
    mechanical properties
    vapors
    porosity

    Cite this

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    abstract = "Through a controlled variation of the applied current during porous silicon formation, newly developed processes enable previously unattainable structural integrity of all-mesoporous silicon microelectromechanical systems (MEMS) structures. Such structures are desirable for applications such as sensing where the large surface area and low Young's modulus of the high porosity layer enable ultra-high sensitivity detection of adsorbed species. In this work, micromachined all-mesoporous silicon microbeams were released, allowing both the dynamic and static sensing modes to be studied using such porous structures. Resonant frequencies (50–250 kHz) of released doubly clamped porous silicon microbeams were measured, allowing mechanical properties to be extracted. Static mode sensing of vapour at the 1100 ppm level was also performed, with the released porous silicon cantilevers showing a significant 6.5 μm (3.7{\%} of a 175 μm beam length) and repeatable deflection after exposure.",
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    AU - Parish, Giacinta

    AU - Keating, Adrian

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    N2 - Through a controlled variation of the applied current during porous silicon formation, newly developed processes enable previously unattainable structural integrity of all-mesoporous silicon microelectromechanical systems (MEMS) structures. Such structures are desirable for applications such as sensing where the large surface area and low Young's modulus of the high porosity layer enable ultra-high sensitivity detection of adsorbed species. In this work, micromachined all-mesoporous silicon microbeams were released, allowing both the dynamic and static sensing modes to be studied using such porous structures. Resonant frequencies (50–250 kHz) of released doubly clamped porous silicon microbeams were measured, allowing mechanical properties to be extracted. Static mode sensing of vapour at the 1100 ppm level was also performed, with the released porous silicon cantilevers showing a significant 6.5 μm (3.7% of a 175 μm beam length) and repeatable deflection after exposure.

    AB - Through a controlled variation of the applied current during porous silicon formation, newly developed processes enable previously unattainable structural integrity of all-mesoporous silicon microelectromechanical systems (MEMS) structures. Such structures are desirable for applications such as sensing where the large surface area and low Young's modulus of the high porosity layer enable ultra-high sensitivity detection of adsorbed species. In this work, micromachined all-mesoporous silicon microbeams were released, allowing both the dynamic and static sensing modes to be studied using such porous structures. Resonant frequencies (50–250 kHz) of released doubly clamped porous silicon microbeams were measured, allowing mechanical properties to be extracted. Static mode sensing of vapour at the 1100 ppm level was also performed, with the released porous silicon cantilevers showing a significant 6.5 μm (3.7% of a 175 μm beam length) and repeatable deflection after exposure.

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