Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range

Venkatesh Venkatesh, N. Bhat, K.J. Vinoy, S. Grandhi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)013006-1 - 013006-8
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume11
Issue number1
DOIs
Publication statusPublished - 2012

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