Microelectromechanical systems (MEMS) and methods

Dhirendra Tripathi (Inventor), Buddhika Silva (Inventor), Lorenzo Faraone (Inventor), John Bumgarner (Inventor), John Dell (Inventor), Jaroslaw Antoszewski (Inventor), Mariusz Martyniuk (Inventor), Kirsten Brookshire (Inventor), Haifeng Mao (Inventor), Yinong Liu (Inventor)

Research output: Patent

Original languageEnglish
Patent numberAU2015901600; WO/2016/176735A1
Publication statusPublished - 2015

Cite this

title = "Microelectromechanical systems (MEMS) and methods",
author = "Dhirendra Tripathi and Buddhika Silva and Lorenzo Faraone and John Bumgarner and John Dell and Jaroslaw Antoszewski and Mariusz Martyniuk and Kirsten Brookshire and Haifeng Mao and Yinong Liu",
year = "2015",
language = "English",
type = "Patent",
note = "AU2015901600; WO/2016/176735A1",



T1 - Microelectromechanical systems (MEMS) and methods

AU - Tripathi, Dhirendra

AU - Silva, Buddhika

AU - Faraone, Lorenzo

AU - Bumgarner, John

AU - Dell, John

AU - Antoszewski, Jaroslaw

AU - Martyniuk, Mariusz

AU - Brookshire, Kirsten

AU - Mao, Haifeng

AU - Liu, Yinong

PY - 2015

Y1 - 2015

M3 - Patent

M1 - AU2015901600; WO/2016/176735A1

ER -

Tripathi D, Silva B, Faraone L, Bumgarner J, Dell J, Antoszewski J et al, inventors. Microelectromechanical systems (MEMS) and methods. AU2015901600; WO/2016/176735A1. 2015.