Microelectromechanical systems (MEMS) and methods

Dhirendra Tripathi; Buddhika Silva; Lorenzo Faraone; John Bumgarner; John Dell; Jaroslaw Antoszewski; Mariusz Martyniuk; Kirsten Brookshire; Haifeng Mao; Yinong Liu

Microelectromechanical systems (MEMS) and methods

Dhirendra Tripathi (Inventor), Buddhika Silva (Inventor), Lorenzo Faraone (Inventor), John Bumgarner (Inventor), John Dell (Inventor), Jaroslaw Antoszewski (Inventor), Mariusz Martyniuk (Inventor), Kirsten Brookshire (Inventor), Haifeng Mao (Inventor), Yinong Liu (Inventor)

Research output: Patent › peer-review

Original language	English
Patent number	AU2015901600; WO/2016/176735A1
Publication status	Published - 2015

Cite this

@misc{3c004fb4fc5a4c90b1ade4ba78c2ef8c,

title = "Microelectromechanical systems (MEMS) and methods",

author = "Dhirendra Tripathi and Buddhika Silva and Lorenzo Faraone and John Bumgarner and John Dell and Jaroslaw Antoszewski and Mariusz Martyniuk and Kirsten Brookshire and Haifeng Mao and Yinong Liu",

year = "2015",

language = "English",

type = "Patent",

note = "AU2015901600; WO/2016/176735A1",

}