Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors

Research output: Chapter in Book/Conference paperConference paper

Abstract

This paper presents a simple and easy to implement algorithm to model the optical performance degradation of Micro Electro-Mechanical Systems (MEMS) based multithin film mirrors and filters due to imperfections introduced typically during the fabrication process. Simulated transmission spectra produced using this algorithm are found to be in excellent agreement with the measured spectral transmission data of fabricated MEMS mid-wave infrared Fabry Perot filters.

Original languageEnglish
Title of host publication2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages35-38
Number of pages4
ISBN (Electronic)9781538695241
DOIs
Publication statusPublished - 14 May 2019
Event2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 - Perth, Australia
Duration: 9 Dec 201813 Dec 2018

Publication series

Name2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018

Conference

Conference2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
CountryAustralia
CityPerth
Period9/12/1813/12/18

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