Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors

Research output: Chapter in Book/Conference paperConference paper

Abstract

This paper presents a simple and easy to implement algorithm to model the optical performance degradation of Micro Electro-Mechanical Systems (MEMS) based multithin film mirrors and filters due to imperfections introduced typically during the fabrication process. Simulated transmission spectra produced using this algorithm are found to be in excellent agreement with the measured spectral transmission data of fabricated MEMS mid-wave infrared Fabry Perot filters.

Original languageEnglish
Title of host publication2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages35-38
Number of pages4
ISBN (Electronic)9781538695241
DOIs
Publication statusPublished - 14 May 2019
Event2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 - Perth, Australia
Duration: 9 Dec 201813 Dec 2018

Publication series

Name2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018

Conference

Conference2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018
CountryAustralia
CityPerth
Period9/12/1813/12/18

Fingerprint

Optical filters
optical filters
mirrors
filters
Thin films
data transmission
thin films
Data communication systems
degradation
Infrared radiation
Fabrication
Degradation
Defects
fabrication
defects

Cite this

Silva, J., Thripathi, D., Kala, H., Silva, D., Putrino, G., Keating, A., ... Faraone, L. (2019). Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors. In 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 (pp. 35-38). [8715240] (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/COMMAD.2018.8715240
Silva, Jorge ; Thripathi, Dhirendra ; Kala, Hemendra ; Silva, Dilusha ; Putrino, Gino ; Keating, Adrian ; Martyniuk, Mariusz ; Faraone, Lorenzo. / Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors. 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, 2019. pp. 35-38 (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).
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abstract = "This paper presents a simple and easy to implement algorithm to model the optical performance degradation of Micro Electro-Mechanical Systems (MEMS) based multithin film mirrors and filters due to imperfections introduced typically during the fabrication process. Simulated transmission spectra produced using this algorithm are found to be in excellent agreement with the measured spectral transmission data of fabricated MEMS mid-wave infrared Fabry Perot filters.",
author = "Jorge Silva and Dhirendra Thripathi and Hemendra Kala and Dilusha Silva and Gino Putrino and Adrian Keating and Mariusz Martyniuk and Lorenzo Faraone",
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series = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
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Silva, J, Thripathi, D, Kala, H, Silva, D, Putrino, G, Keating, A, Martyniuk, M & Faraone, L 2019, Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors. in 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018., 8715240, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018, IEEE, Institute of Electrical and Electronics Engineers, pp. 35-38, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018, Perth, Australia, 9/12/18. https://doi.org/10.1109/COMMAD.2018.8715240

Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors. / Silva, Jorge; Thripathi, Dhirendra; Kala, Hemendra; Silva, Dilusha; Putrino, Gino; Keating, Adrian; Martyniuk, Mariusz; Faraone, Lorenzo.

2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, 2019. p. 35-38 8715240 (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

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Silva J, Thripathi D, Kala H, Silva D, Putrino G, Keating A et al. Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors. In 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers. 2019. p. 35-38. 8715240. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018). https://doi.org/10.1109/COMMAD.2018.8715240