@inproceedings{25bd3277271742ee82dd05e33bd5ae66,
title = "Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors",
abstract = "This paper presents a simple and easy to implement algorithm to model the optical performance degradation of Micro Electro-Mechanical Systems (MEMS) based multithin film mirrors and filters due to imperfections introduced typically during the fabrication process. Simulated transmission spectra produced using this algorithm are found to be in excellent agreement with the measured spectral transmission data of fabricated MEMS mid-wave infrared Fabry Perot filters.",
author = "Jorge Silva and Dhirendra Thripathi and Hemendra Kala and Dilusha Silva and Gino Putrino and Adrian Keating and Mariusz Martyniuk and Lorenzo Faraone",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/COMMAD.2018.8715240",
language = "English",
series = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
pages = "35--38",
booktitle = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018",
address = "United States",
note = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 ; Conference date: 09-12-2018 Through 13-12-2018",
}