MEMS Devices

J.M. Quero; A. Luque; L. Castañer; A. Rodríguez; A. Ionescu; M. Fernández-Bolaños; Lorenzo Faraone; John Dell

MEMS Devices

J.M. Quero, A. Luque, L. Castañer, A. Rodríguez, A. Ionescu, M. Fernández-Bolaños, Lorenzo Faraone, John Dell

Graduate Research School

Research output: Chapter in Book/Conference paper › Chapter › peer-review

Original language	English
Title of host publication	The Industrial Electronics Handbook - Fundamentals of Industrial Electronics
Editors	Bogdan M. Wilamowski, J. David Irwin
Place of Publication	United States of America
Publisher	CRS Press Taylor & Francis Group
Pages	13-1 - 13-33
Volume	1 only
Edition	Second
ISBN (Print)	9781439802793
Publication status	Published - 2011

Cite this

@inbook{46becf8229004685b1771bda5edcebec,

title = "MEMS Devices",

author = "J.M. Quero and A. Luque and L. Casta{\~n}er and A. Rodr{\'i}guez and A. Ionescu and M. Fern{\'a}ndez-Bola{\~n}os and Lorenzo Faraone and John Dell",

year = "2011",

language = "English",

isbn = "9781439802793",

volume = "1 only",

pages = "13--1 -- 13--33",

editor = "Wilamowski, {Bogdan M.} and Irwin, {J. David}",

booktitle = "The Industrial Electronics Handbook - Fundamentals of Industrial Electronics",

publisher = "CRS Press Taylor & Francis Group",

edition = "Second",

}

TY - CHAP

T1 - MEMS Devices

AU - Quero, J.M.

AU - Luque, A.

AU - Castañer, L.

AU - Rodríguez, A.

AU - Ionescu, A.

AU - Fernández-Bolaños, M.

AU - Faraone, Lorenzo

AU - Dell, John

PY - 2011

Y1 - 2011

M3 - Chapter

SN - 9781439802793

VL - 1 only

SP - 13-1 - 13-33

BT - The Industrial Electronics Handbook - Fundamentals of Industrial Electronics

A2 - Wilamowski, Bogdan M.

A2 - Irwin, J. David

PB - CRS Press Taylor & Francis Group

CY - United States of America

ER -