MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging

Yan Liu; Gurpreet Gill; Hemendra Kala; K. K.M.B.Dilusha Silva; Gilberto A. Umana Membreno; Jarek Antoszewski; Lorenzo Faraone

doi:10.1109/OMN65869.2025.11126001

MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Abstract

MEMS spectrometers operating in the shortwave infrared (SWIR) range are achieving significant progress in agriculture by offering portable solutions for soil and crop analysis. Recent innovations focus on extending the actuation range of MEMS tunable optical filters and addressing issues like snap-down with a new floating electrode design. This approach improves stability and expands the wavelength range from 1.25 μm to 1.76 μm. These enhancements ensure the devices perform reliably under various conditions, helping in precise agricultural assessments and better crop management.

Original language	English
Title of host publication	2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025
Place of Publication	USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
ISBN (Electronic)	9798331599225
DOIs	https://doi.org/10.1109/OMN65869.2025.11126001
Publication status	Published - 2025
Event	2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025 - Chiangmai, Thailand Duration: 13 Jul 2025 → 18 Jul 2025

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025
Country/Territory	Thailand
City	Chiangmai
Period	13/07/25 → 18/07/25

Funding

Funders	Funder number
ARC Australian Research Council	CE200100010

Access to Document

10.1109/OMN65869.2025.11126001

Cite this

Liu, Y., Gill, G., Kala, H., Silva, K. K. M. B. D., Umana Membreno, G. A., Antoszewski, J., & Faraone, L. (2025). MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging. In 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025 (International Conference on Optical MEMS and Nanophotonics). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/OMN65869.2025.11126001

@inproceedings{53eda93e1b0642ac8f5ddd0d7dc94a69,

title = "MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging",

abstract = "MEMS spectrometers operating in the shortwave infrared (SWIR) range are achieving significant progress in agriculture by offering portable solutions for soil and crop analysis. Recent innovations focus on extending the actuation range of MEMS tunable optical filters and addressing issues like snap-down with a new floating electrode design. This approach improves stability and expands the wavelength range from 1.25 μm to 1.76 μm. These enhancements ensure the devices perform reliably under various conditions, helping in precise agricultural assessments and better crop management.",

keywords = "Electrostatic actuation, Floating electrode design, Hand-held instruments, MEMS, multi-spectral imaging, Snap-down, Spectrometers, SWIR, Tunable infrared filter",

author = "Yan Liu and Gurpreet Gill and Hemendra Kala and Silva, \{K. K.M.B.Dilusha\} and \{Umana Membreno\}, \{Gilberto A.\} and Jarek Antoszewski and Lorenzo Faraone",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025 ; Conference date: 13-07-2025 Through 18-07-2025",

year = "2025",

doi = "10.1109/OMN65869.2025.11126001",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

booktitle = "2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025",

address = "United States",

}

Liu, Y, Gill, G , Kala, H , Silva, KKMBD , Umana Membreno, GA , Antoszewski, J & Faraone, L 2025, MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging. in 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025. International Conference on Optical MEMS and Nanophotonics, IEEE, Institute of Electrical and Electronics Engineers, USA, 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025, Chiangmai, Thailand, 13/07/25. https://doi.org/10.1109/OMN65869.2025.11126001

MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging. / Liu, Yan; Gill, Gurpreet ; Kala, Hemendra et al.
2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025. USA: IEEE, Institute of Electrical and Electronics Engineers, 2025. (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - MEMS-based Tunable Infrared Filters

T2 - 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025

AU - Liu, Yan

AU - Gill, Gurpreet

AU - Kala, Hemendra

AU - Silva, K. K.M.B.Dilusha

AU - Umana Membreno, Gilberto A.

AU - Antoszewski, Jarek

AU - Faraone, Lorenzo

PY - 2025

Y1 - 2025

N2 - MEMS spectrometers operating in the shortwave infrared (SWIR) range are achieving significant progress in agriculture by offering portable solutions for soil and crop analysis. Recent innovations focus on extending the actuation range of MEMS tunable optical filters and addressing issues like snap-down with a new floating electrode design. This approach improves stability and expands the wavelength range from 1.25 μm to 1.76 μm. These enhancements ensure the devices perform reliably under various conditions, helping in precise agricultural assessments and better crop management.

AB - MEMS spectrometers operating in the shortwave infrared (SWIR) range are achieving significant progress in agriculture by offering portable solutions for soil and crop analysis. Recent innovations focus on extending the actuation range of MEMS tunable optical filters and addressing issues like snap-down with a new floating electrode design. This approach improves stability and expands the wavelength range from 1.25 μm to 1.76 μm. These enhancements ensure the devices perform reliably under various conditions, helping in precise agricultural assessments and better crop management.

KW - Electrostatic actuation

KW - Floating electrode design

KW - Hand-held instruments

KW - MEMS

KW - multi-spectral imaging

KW - Snap-down

KW - Spectrometers

KW - SWIR

KW - Tunable infrared filter

UR - https://www.scopus.com/pages/publications/105015797190

U2 - 10.1109/OMN65869.2025.11126001

DO - 10.1109/OMN65869.2025.11126001

M3 - Conference paper

AN - SCOPUS:105015797190

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - USA

Y2 - 13 July 2025 through 18 July 2025

ER -

Liu Y, Gill G , Kala H , Silva KKMBD , Umana Membreno GA , Antoszewski J et al. MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging. In 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025. USA: IEEE, Institute of Electrical and Electronics Engineers. 2025. (International Conference on Optical MEMS and Nanophotonics). Epub 2025. doi: 10.1109/OMN65869.2025.11126001

MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging

Abstract

Publication series

Conference

Funding

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ARC Centre of Excellence for Transformative Meta-Optical Systems

Cite this

MEMS-based Tunable Infrared Filters: SWIR Multi-spectral Imaging

Abstract

Publication series

Conference

Funding

Access to Document

Other files and links

Fingerprint

Projects

ARC Centre of Excellence for Transformative Meta-Optical Systems

Cite this