MEMS-based tunable Fabry-Perot filters for multispectral thermal imaging applications

Haifeng Mao

MEMS-based tunable Fabry-Perot filters for multispectral thermal imaging applications

Haifeng Mao

Research output: Thesis › Doctoral Thesis

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Abstract

The thesis reports on a micro-electromechanical-system based tunable Fabry-Perot filter for mult1spectral thermal imaging applications. The filter consists of a single-layer Ge suspended top mirror and a four-layer Ge/ZnS/Ge/ZnS bottom mirror on a silicon substrate. The filter is demonstrated with nanometer-scale mirror flatness across a millimeter-dimension optical area, and has achieved near-theoretical on-pixel spectral characteristics over the entire wavelength tuning range of 8.5-11.5 µm, including a peak transmission of 80%, a FWHM of 500 nm, and a pixel-to-pixel peak wavelength uniformity of 1.2%. which exceed the optical requirements for multispectral thermal imaging applications based on large-area focal plane arrays.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	The University of Western Australia
Supervisors/Advisors	Faraone, Lorenzo, Supervisor Antoszewski, Jarek, Supervisor Silva, Dilusha, Supervisor Martyniuk, Mariusz, Supervisor
Award date	11 Oct 2016
Publication status	Unpublished - 2016

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Cite this

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title = "MEMS-based tunable Fabry-Perot filters for multispectral thermal imaging applications",

abstract = "The thesis reports on a micro-electromechanical-system based tunable Fabry-Perot filter for mult1spectral thermal imaging applications. The filter consists of a single-layer Ge suspended top mirror and a four-layer Ge/ZnS/Ge/ZnS bottom mirror on a silicon substrate. The filter is demonstrated with nanometer-scale mirror flatness across a millimeter-dimension optical area, and has achieved near-theoretical on-pixel spectral characteristics over the entire wavelength tuning range of 8.5-11.5 µm, including a peak transmission of 80%, a FWHM of 500 nm, and a pixel-to-pixel peak wavelength uniformity of 1.2%. which exceed the optical requirements for multispectral thermal imaging applications based on large-area focal plane arrays.",

keywords = "Fabry-Perot, Long-wavelength infrared, Micro-electromechanical systems (MEMS), Multispectral thermal imaging, Optical interference filters",

author = "Haifeng Mao",

year = "2016",

language = "English",

school = "The University of Western Australia",

}

TY - BOOK

T1 - MEMS-based tunable Fabry-Perot filters for multispectral thermal imaging applications

AU - Mao, Haifeng

PY - 2016

Y1 - 2016

N2 - The thesis reports on a micro-electromechanical-system based tunable Fabry-Perot filter for mult1spectral thermal imaging applications. The filter consists of a single-layer Ge suspended top mirror and a four-layer Ge/ZnS/Ge/ZnS bottom mirror on a silicon substrate. The filter is demonstrated with nanometer-scale mirror flatness across a millimeter-dimension optical area, and has achieved near-theoretical on-pixel spectral characteristics over the entire wavelength tuning range of 8.5-11.5 µm, including a peak transmission of 80%, a FWHM of 500 nm, and a pixel-to-pixel peak wavelength uniformity of 1.2%. which exceed the optical requirements for multispectral thermal imaging applications based on large-area focal plane arrays.

AB - The thesis reports on a micro-electromechanical-system based tunable Fabry-Perot filter for mult1spectral thermal imaging applications. The filter consists of a single-layer Ge suspended top mirror and a four-layer Ge/ZnS/Ge/ZnS bottom mirror on a silicon substrate. The filter is demonstrated with nanometer-scale mirror flatness across a millimeter-dimension optical area, and has achieved near-theoretical on-pixel spectral characteristics over the entire wavelength tuning range of 8.5-11.5 µm, including a peak transmission of 80%, a FWHM of 500 nm, and a pixel-to-pixel peak wavelength uniformity of 1.2%. which exceed the optical requirements for multispectral thermal imaging applications based on large-area focal plane arrays.

KW - Fabry-Perot

KW - Long-wavelength infrared

KW - Micro-electromechanical systems (MEMS)

KW - Multispectral thermal imaging

KW - Optical interference filters

M3 - Doctoral Thesis

ER -

MEMS-based tunable Fabry-Perot filters for multispectral thermal imaging applications

Abstract

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