MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Research output: Chapter in Book/Conference paperConference paper

Abstract

We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

Original languageEnglish
Title of host publicationRAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages189-192
Number of pages4
ISBN (Electronic)9781538653494
DOIs
Publication statusPublished - 24 Oct 2018
Event1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018 - Mirimar Beach, United States
Duration: 22 Aug 201824 Aug 2018

Conference

Conference1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018
CountryUnited States
CityMirimar Beach
Period22/08/1824/08/18

Fingerprint

microelectromechanical systems
MEMS
air
Infrared radiation
Distributed Bragg reflectors
Imaging techniques
filters
Wavelength
Bragg reflectors
wavelengths
Tuning
tuning
Wave filters
tunable filters
Silicon
flatness
Linewidth
narrowband
platforms
membranes

Cite this

Silva, J., Kala, H., Tripathi, D. K., Silva, K. K. M. B. D., Martyniuk, M., Keating, A., ... Faraone, L. (2018). MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. In RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference (pp. 189-192). [8508961] USA: IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/RAPID.2018.8508961
Silva, Jorge ; Kala, Hemendra ; Tripathi, Dhirendra Kumar ; Silva, K. K.M.B.Dilusha ; Martyniuk, Mariusz ; Keating, Adrian ; Putrino, Gino ; Faraone, Lorenzo. / MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference. USA : IEEE, Institute of Electrical and Electronics Engineers, 2018. pp. 189-192
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title = "MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging",
abstract = "We present a MEMS tunable Fabry-P{\'e}rot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5{\%} across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2{\%}.",
author = "Jorge Silva and Hemendra Kala and Tripathi, {Dhirendra Kumar} and Silva, {K. K.M.B.Dilusha} and Mariusz Martyniuk and Adrian Keating and Gino Putrino and Lorenzo Faraone",
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Silva, J, Kala, H, Tripathi, DK, Silva, KKMBD, Martyniuk, M, Keating, A, Putrino, G & Faraone, L 2018, MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. in RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference., 8508961, IEEE, Institute of Electrical and Electronics Engineers, USA, pp. 189-192, 1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018, Mirimar Beach, United States, 22/08/18. https://doi.org/10.1109/RAPID.2018.8508961

MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. / Silva, Jorge; Kala, Hemendra; Tripathi, Dhirendra Kumar; Silva, K. K.M.B.Dilusha; Martyniuk, Mariusz; Keating, Adrian; Putrino, Gino; Faraone, Lorenzo.

RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference. USA : IEEE, Institute of Electrical and Electronics Engineers, 2018. p. 189-192 8508961.

Research output: Chapter in Book/Conference paperConference paper

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AU - Silva, Jorge

AU - Kala, Hemendra

AU - Tripathi, Dhirendra Kumar

AU - Silva, K. K.M.B.Dilusha

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Putrino, Gino

AU - Faraone, Lorenzo

PY - 2018/10/24

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N2 - We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

AB - We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

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BT - RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - USA

ER -

Silva J, Kala H, Tripathi DK, Silva KKMBD, Martyniuk M, Keating A et al. MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. In RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference. USA: IEEE, Institute of Electrical and Electronics Engineers. 2018. p. 189-192. 8508961 https://doi.org/10.1109/RAPID.2018.8508961