MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Jorge Silva; Hemendra Kala; Dhirendra Kumar Tripathi; K. K.M.B.Dilusha Silva; Mariusz Martyniuk; Adrian Keating; Gino Putrino; Lorenzo Faraone

doi:10.1109/RAPID.2018.8508961

MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Jorge Silva, Hemendra Kala, Dhirendra Kumar Tripathi, K. K.M.B.Dilusha Silva, Mariusz Martyniuk, Adrian Keating, Gino Putrino, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

3 Citations (Scopus)

Abstract

We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λ_c < 2%.

Original language	English
Title of host publication	RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference
Place of Publication	USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	189-192
Number of pages	4
ISBN (Electronic)	9781538653494
DOIs	https://doi.org/10.1109/RAPID.2018.8508961
Publication status	Published - 24 Oct 2018
Event	1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018 - Mirimar Beach, United States Duration: 22 Aug 2018 → 24 Aug 2018

Conference

Conference	1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018
Country/Territory	United States
City	Mirimar Beach
Period	22/08/18 → 24/08/18

Access to Document

10.1109/RAPID.2018.8508961

Cite this

Silva, J., Kala, H., Tripathi, D. K., Silva, K. K. M. B. D., Martyniuk, M., Keating, A., Putrino, G., & Faraone, L. (2018). MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. In RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference (pp. 189-192). Article 8508961 IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/RAPID.2018.8508961

@inproceedings{2573fbb86e6d48da8a24f26ff31f4f19,

title = "MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging",

abstract = "We present a MEMS tunable Fabry-P{\'e}rot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.",

author = "Jorge Silva and Hemendra Kala and Tripathi, {Dhirendra Kumar} and Silva, {K. K.M.B.Dilusha} and Mariusz Martyniuk and Adrian Keating and Gino Putrino and Lorenzo Faraone",

year = "2018",

month = oct,

day = "24",

doi = "10.1109/RAPID.2018.8508961",

language = "English",

pages = "189--192",

booktitle = "RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018 ; Conference date: 22-08-2018 Through 24-08-2018",

}

Silva, J, Kala, H, Tripathi, DK, Silva, KKMBD, Martyniuk, M , Keating, A, Putrino, G & Faraone, L 2018, MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. in RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference., 8508961, IEEE, Institute of Electrical and Electronics Engineers, USA, pp. 189-192, 1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018, Mirimar Beach, United States, 22/08/18. https://doi.org/10.1109/RAPID.2018.8508961

MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging. / Silva, Jorge; Kala, Hemendra; Tripathi, Dhirendra Kumar et al.
RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference. USA: IEEE, Institute of Electrical and Electronics Engineers, 2018. p. 189-192 8508961.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

AU - Silva, Jorge

AU - Kala, Hemendra

AU - Tripathi, Dhirendra Kumar

AU - Silva, K. K.M.B.Dilusha

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Putrino, Gino

AU - Faraone, Lorenzo

PY - 2018/10/24

Y1 - 2018/10/24

N2 - We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

AB - We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

UR - http://www.scopus.com/inward/record.url?scp=85057106239&partnerID=8YFLogxK

U2 - 10.1109/RAPID.2018.8508961

DO - 10.1109/RAPID.2018.8508961

M3 - Conference paper

AN - SCOPUS:85057106239

SP - 189

EP - 192

BT - RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - USA

T2 - 1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018

Y2 - 22 August 2018 through 24 August 2018

ER -

MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Abstract

Conference

Access to Document

Other files and links

Fingerprint

Cite this