MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Research output: Chapter in Book/Conference paperConference paper

Abstract

We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λc < 2%.

Original languageEnglish
Title of host publicationRAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages189-192
Number of pages4
ISBN (Electronic)9781538653494
DOIs
Publication statusPublished - 24 Oct 2018
Event1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018 - Mirimar Beach, United States
Duration: 22 Aug 201824 Aug 2018

Conference

Conference1st IEEE Research and Applications of Photonics In Defense Conference, RAPID 2018
CountryUnited States
CityMirimar Beach
Period22/08/1824/08/18

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