MEMS based hydrogen sensing with parts-per-billion resolution

J. T. Gurusamy; Gino Putrino; Roger D. Jeffery; K. K. M. B. Dilusha Silva; Mariusz Martyniuk; Adrian Keating; Lorenzo Faraone

doi:10.1016/j.snb.2018.07.118

MEMS based hydrogen sensing with parts-per-billion resolution

J. T. Gurusamy, Gino Putrino, Roger D. Jeffery, K. K. M. B. Dilusha Silva, Mariusz Martyniuk, Adrian Keating, Lorenzo Faraone

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.

Original language	English
Pages (from-to)	335-342
Number of pages	8
Journal	SENSORS AND ACTUATORS B-CHEMICAL
Volume	281
DOIs	https://doi.org/10.1016/j.snb.2018.07.118
Publication status	Published - 15 Feb 2019

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title = "MEMS based hydrogen sensing with parts-per-billion resolution",

abstract = "This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.",

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AU - Gurusamy, J. T.

AU - Putrino, Gino

AU - Jeffery, Roger D.

AU - Silva, K. K. M. B. Dilusha

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2019/2/15

Y1 - 2019/2/15

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AB - This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.

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KW - Cantilever

KW - Gas sensor

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KW - MOEMS

KW - PALLADIUM

KW - SENSORS

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JO - SENSORS AND ACTUATORS B-CHEMICAL

JF - SENSORS AND ACTUATORS B-CHEMICAL

ER -

MEMS based hydrogen sensing with parts-per-billion resolution

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