MEMS based hydrogen sensing with parts-per-billion resolution

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.

Original languageEnglish
Pages (from-to)335-342
Number of pages8
JournalSENSORS AND ACTUATORS B-CHEMICAL
Volume281
DOIs
Publication statusPublished - 15 Feb 2019

Cite this

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title = "MEMS based hydrogen sensing with parts-per-billion resolution",
abstract = "This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.",
keywords = "Hydrogen, Cantilever, Gas sensor, MEMS, MOEMS, PALLADIUM, SENSORS",
author = "Gurusamy, {J. T.} and Gino Putrino and Jeffery, {Roger D.} and Silva, {K. K. M. B. Dilusha} and Mariusz Martyniuk and Adrian Keating and Lorenzo Faraone",
year = "2019",
month = "2",
day = "15",
doi = "10.1016/j.snb.2018.07.118",
language = "English",
volume = "281",
pages = "335--342",
journal = "Sensors and Actuators B: Chemical",
issn = "0925-4005",
publisher = "Elsevier Science & Technology",

}

MEMS based hydrogen sensing with parts-per-billion resolution. / Gurusamy, J. T.; Putrino, Gino; Jeffery, Roger D.; Silva, K. K. M. B. Dilusha; Martyniuk, Mariusz; Keating, Adrian; Faraone, Lorenzo.

In: SENSORS AND ACTUATORS B-CHEMICAL, Vol. 281, 15.02.2019, p. 335-342.

Research output: Contribution to journalArticle

TY - JOUR

T1 - MEMS based hydrogen sensing with parts-per-billion resolution

AU - Gurusamy, J. T.

AU - Putrino, Gino

AU - Jeffery, Roger D.

AU - Silva, K. K. M. B. Dilusha

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2019/2/15

Y1 - 2019/2/15

N2 - This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.

AB - This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor utilizing a micro-cantilever (MC) functionalized with palladium, and an integrated silicon photonics based interferometric optical readout. The entire sensor is fabricated using standard surface micromachining processes, and the combined MEMS and optical readout allows extension to sensor-array implementations in the future. The sensor has a demonstrated capability of resolving a 38 ppb change in hydrogen concentration at room temperature and pressure, at an ambient background concentration of 50 ppm. This sensor platform provides a pathway towards realization of robust miniaturized devices for high precision monitoring of low-concentration hydrogen, as well as being suitable for future extension to multi-gas sensor-arrays.

KW - Hydrogen

KW - Cantilever

KW - Gas sensor

KW - MEMS

KW - MOEMS

KW - PALLADIUM

KW - SENSORS

U2 - 10.1016/j.snb.2018.07.118

DO - 10.1016/j.snb.2018.07.118

M3 - Article

VL - 281

SP - 335

EP - 342

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

SN - 0925-4005

ER -