MEMS actuator geometries for extended range of actuation

Fei Guo, Mariusz Martyniuk, Buddhika Silva, John Bumgarner, Kirsten Brookshire, Yinong Liu, Lorenzo Faraone

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 2016
Event International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia
Duration: 7 Feb 201611 Feb 2016

Conference

Conference International Conference on Nanoscience and Nanotechnology (ICONN 2016)
CountryAustralia
CityCanberra
Period7/02/1611/02/16

Cite this

Guo, F., Martyniuk, M., Silva, B., Bumgarner, J., Brookshire, K., Liu, Y., & Faraone, L. (2016). MEMS actuator geometries for extended range of actuation. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.