MEMS actuator geometries for extended range of actuation

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 2016
Event International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia
Duration: 7 Feb 201611 Feb 2016

Conference

Conference International Conference on Nanoscience and Nanotechnology (ICONN 2016)
CountryAustralia
CityCanberra
Period7/02/1611/02/16

Cite this

Guo, F., Martyniuk, M., Silva, B., Bumgarner, J., Brookshire, K., Liu, Y., & Faraone, L. (2016). MEMS actuator geometries for extended range of actuation. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.
Guo, Fei ; Martyniuk, Mariusz ; Silva, Buddhika ; Bumgarner, John ; Brookshire, Kirsten ; Liu, Yinong ; Faraone, Lorenzo. / MEMS actuator geometries for extended range of actuation. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.
@conference{aa4dee38757548d79cf46cd1ab0ea8b1,
title = "MEMS actuator geometries for extended range of actuation",
author = "Fei Guo and Mariusz Martyniuk and Buddhika Silva and John Bumgarner and Kirsten Brookshire and Yinong Liu and Lorenzo Faraone",
year = "2016",
language = "English",
note = "International Conference on Nanoscience and Nanotechnology (ICONN 2016) ; Conference date: 07-02-2016 Through 11-02-2016",

}

Guo, F, Martyniuk, M, Silva, B, Bumgarner, J, Brookshire, K, Liu, Y & Faraone, L 2016, 'MEMS actuator geometries for extended range of actuation' International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia, 7/02/16 - 11/02/16, .

MEMS actuator geometries for extended range of actuation. / Guo, Fei; Martyniuk, Mariusz; Silva, Buddhika; Bumgarner, John; Brookshire, Kirsten; Liu, Yinong; Faraone, Lorenzo.

2016. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.

Research output: Contribution to conferenceAbstract

TY - CONF

T1 - MEMS actuator geometries for extended range of actuation

AU - Guo, Fei

AU - Martyniuk, Mariusz

AU - Silva, Buddhika

AU - Bumgarner, John

AU - Brookshire, Kirsten

AU - Liu, Yinong

AU - Faraone, Lorenzo

PY - 2016

Y1 - 2016

UR - http://ausnano.net/iconn2016/

M3 - Abstract

ER -

Guo F, Martyniuk M, Silva B, Bumgarner J, Brookshire K, Liu Y et al. MEMS actuator geometries for extended range of actuation. 2016. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.