MEMS actuator geometries for extended range of actuation

Research output: Contribution to conference › Abstract › peer-review

Original language	English
Publication status	Published - 2016
Event	International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia Duration: 7 Feb 2016 → 11 Feb 2016

Conference	International Conference on Nanoscience and Nanotechnology (ICONN 2016)
Country/Territory	Australia
City	Canberra
Period	7/02/16 → 11/02/16

Cite this

@conference{aa4dee38757548d79cf46cd1ab0ea8b1,

title = "MEMS actuator geometries for extended range of actuation",

author = "Fei Guo and Mariusz Martyniuk and Buddhika Silva and John Bumgarner and Kirsten Brookshire and Yinong Liu and Lorenzo Faraone",

year = "2016",

language = "English",

note = " International Conference on Nanoscience and Nanotechnology (ICONN 2016) ; Conference date: 07-02-2016 Through 11-02-2016",

}

TY - CONF

T1 - MEMS actuator geometries for extended range of actuation

AU - Guo, Fei

AU - Martyniuk, Mariusz

AU - Silva, Buddhika

AU - Bumgarner, John

AU - Brookshire, Kirsten

AU - Liu, Yinong

AU - Faraone, Lorenzo

PY - 2016

Y1 - 2016

UR - http://ausnano.net/iconn2016/

M3 - Abstract

T2 - International Conference on Nanoscience and Nanotechnology (ICONN 2016)

Y2 - 7 February 2016 through 11 February 2016

ER -