Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF2) thin-films

Gurpreet Gill; Christopher A. Jones; Dhirendra Tripathi; Adrian Keating; Gino Putrino; Dilusha Silva; Lorenzo Faraone; Mariusz Martyniuk

doi:10.1557/s43579-021-00149-2

Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF₂) thin-films

Gurpreet Gill, Christopher A. Jones, Dhirendra Tripathi, Adrian Keating, Gino Putrino, Dilusha Silva, Lorenzo Faraone, Mariusz Martyniuk

Research output: Contribution to journal › Article › peer-review

1 Citation (Web of Science)

Abstract

Elastic modulus and hardness of thin-films are critically important in determining the behaviour of free-standing actuatable microstructures. In this study, nanoindentation has been used to investigate the mechanical properties of thermally evaporated Ge and BaF2 thin-films. Nanoindentation experiments indicate that Ge and BaF2 thin-films are characterised by a reduced modulus of 95 ± 3 GPa and 33 ± 9 GPa, respectively, and hardness of 4.6 ± 0.4 GPa and 0.75 ± 0.4 GPa, respectively. The elastoplastic response of both thin-films was predominantly elastic for low indentation loads, but exhibited plasticity ≥ 60% for indentation loads approaching 8 mN. Indentation-induced creep deformation was found to be limited to ≤ 5%.

Original language	English
Pages (from-to)	112-118
Number of pages	7
Journal	MRS Communications
Volume	12
Issue number	1
DOIs	https://doi.org/10.1557/s43579-021-00149-2
Publication status	Published - Feb 2022

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title = "Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF2) thin-films",

abstract = "Elastic modulus and hardness of thin-films are critically important in determining the behaviour of free-standing actuatable microstructures. In this study, nanoindentation has been used to investigate the mechanical properties of thermally evaporated Ge and BaF2 thin-films. Nanoindentation experiments indicate that Ge and BaF2 thin-films are characterised by a reduced modulus of 95 ± 3 GPa and 33 ± 9 GPa, respectively, and hardness of 4.6 ± 0.4 GPa and 0.75 ± 0.4 GPa, respectively. The elastoplastic response of both thin-films was predominantly elastic for low indentation loads, but exhibited plasticity ≥ 60% for indentation loads approaching 8 mN. Indentation-induced creep deformation was found to be limited to ≤ 5%.",

keywords = "Thin film, Thin film characterization, Thin film deposition, nano-indentation, elastic properties, hardness, microelectromechanical systems",

author = "Gurpreet Gill and Jones, {Christopher A.} and Dhirendra Tripathi and Adrian Keating and Gino Putrino and Dilusha Silva and Lorenzo Faraone and Mariusz Martyniuk",

year = "2022",

month = feb,

doi = "10.1557/s43579-021-00149-2",

language = "English",

volume = "12",

pages = "112--118",

journal = "MRS Communications",

issn = "2159-6859",

publisher = "Cambridge University Press",

number = "1",

}

Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF₂) thin-films. / Gill, Gurpreet; Jones, Christopher A.; Tripathi, Dhirendra ; Keating, Adrian ; Putrino, Gino ; Silva, Dilusha ; Faraone, Lorenzo ; Martyniuk, Mariusz.

In: MRS Communications, Vol. 12, No. 1, 02.2022, p. 112-118.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF2) thin-films

AU - Gill, Gurpreet

AU - Jones, Christopher A.

AU - Tripathi, Dhirendra

AU - Keating, Adrian

AU - Putrino, Gino

AU - Silva, Dilusha

AU - Faraone, Lorenzo

AU - Martyniuk, Mariusz

PY - 2022/2

Y1 - 2022/2

N2 - Elastic modulus and hardness of thin-films are critically important in determining the behaviour of free-standing actuatable microstructures. In this study, nanoindentation has been used to investigate the mechanical properties of thermally evaporated Ge and BaF2 thin-films. Nanoindentation experiments indicate that Ge and BaF2 thin-films are characterised by a reduced modulus of 95 ± 3 GPa and 33 ± 9 GPa, respectively, and hardness of 4.6 ± 0.4 GPa and 0.75 ± 0.4 GPa, respectively. The elastoplastic response of both thin-films was predominantly elastic for low indentation loads, but exhibited plasticity ≥ 60% for indentation loads approaching 8 mN. Indentation-induced creep deformation was found to be limited to ≤ 5%.

AB - Elastic modulus and hardness of thin-films are critically important in determining the behaviour of free-standing actuatable microstructures. In this study, nanoindentation has been used to investigate the mechanical properties of thermally evaporated Ge and BaF2 thin-films. Nanoindentation experiments indicate that Ge and BaF2 thin-films are characterised by a reduced modulus of 95 ± 3 GPa and 33 ± 9 GPa, respectively, and hardness of 4.6 ± 0.4 GPa and 0.75 ± 0.4 GPa, respectively. The elastoplastic response of both thin-films was predominantly elastic for low indentation loads, but exhibited plasticity ≥ 60% for indentation loads approaching 8 mN. Indentation-induced creep deformation was found to be limited to ≤ 5%.

KW - Thin film

KW - Thin film characterization

KW - Thin film deposition

KW - nano-indentation

KW - elastic properties

KW - hardness

KW - microelectromechanical systems

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DO - 10.1557/s43579-021-00149-2

M3 - Article

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JO - MRS Communications

JF - MRS Communications

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ER -

Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF₂) thin-films

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