Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors

H. Huang, Yinong Liu, Xiao Hu, Mark Bush, K.J. Winchester, Charles Musca, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

1 Citation (Scopus)
Original languageEnglish
Title of host publication2004 Conference on Optoelectronic and Microelectronic Materials and Devices
EditorsAleksandar D Rakic, Yew Tong Yeow
Place of PublicationUnited States
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages205-208
Volume1
EditionBrisbane, Australia
ISBN (Print)10972137
Publication statusPublished - 2005
EventMechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors - Brisbane, Australia
Duration: 1 Jan 2005 → …

Conference

ConferenceMechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors
Period1/01/05 → …

Cite this

Huang, H., Liu, Y., Hu, X., Bush, M., Winchester, K. J., Musca, C., ... Faraone, L. (2005). Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors. In A. D. Rakic, & Y. T. Yeow (Eds.), 2004 Conference on Optoelectronic and Microelectronic Materials and Devices (Brisbane, Australia ed., Vol. 1, pp. 205-208). United States: IEEE, Institute of Electrical and Electronics Engineers.
Huang, H. ; Liu, Yinong ; Hu, Xiao ; Bush, Mark ; Winchester, K.J. ; Musca, Charles ; Dell, John ; Faraone, Lorenzo. / Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors. 2004 Conference on Optoelectronic and Microelectronic Materials and Devices. editor / Aleksandar D Rakic ; Yew Tong Yeow. Vol. 1 Brisbane, Australia. ed. United States : IEEE, Institute of Electrical and Electronics Engineers, 2005. pp. 205-208
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title = "Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors",
author = "H. Huang and Yinong Liu and Xiao Hu and Mark Bush and K.J. Winchester and Charles Musca and John Dell and Lorenzo Faraone",
year = "2005",
language = "English",
isbn = "10972137",
volume = "1",
pages = "205--208",
editor = "Rakic, {Aleksandar D} and Yeow, {Yew Tong}",
booktitle = "2004 Conference on Optoelectronic and Microelectronic Materials and Devices",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
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Huang, H, Liu, Y, Hu, X, Bush, M, Winchester, KJ, Musca, C, Dell, J & Faraone, L 2005, Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors. in AD Rakic & YT Yeow (eds), 2004 Conference on Optoelectronic and Microelectronic Materials and Devices. Brisbane, Australia edn, vol. 1, IEEE, Institute of Electrical and Electronics Engineers, United States, pp. 205-208, Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors, 1/01/05.

Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors. / Huang, H.; Liu, Yinong; Hu, Xiao; Bush, Mark; Winchester, K.J.; Musca, Charles; Dell, John; Faraone, Lorenzo.

2004 Conference on Optoelectronic and Microelectronic Materials and Devices. ed. / Aleksandar D Rakic; Yew Tong Yeow. Vol. 1 Brisbane, Australia. ed. United States : IEEE, Institute of Electrical and Electronics Engineers, 2005. p. 205-208.

Research output: Chapter in Book/Conference paperConference paper

TY - GEN

T1 - Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors

AU - Huang, H.

AU - Liu, Yinong

AU - Hu, Xiao

AU - Bush, Mark

AU - Winchester, K.J.

AU - Musca, Charles

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2005

Y1 - 2005

M3 - Conference paper

SN - 10972137

VL - 1

SP - 205

EP - 208

BT - 2004 Conference on Optoelectronic and Microelectronic Materials and Devices

A2 - Rakic, Aleksandar D

A2 - Yeow, Yew Tong

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States

ER -

Huang H, Liu Y, Hu X, Bush M, Winchester KJ, Musca C et al. Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors. In Rakic AD, Yeow YT, editors, 2004 Conference on Optoelectronic and Microelectronic Materials and Devices. Brisbane, Australia ed. Vol. 1. United States: IEEE, Institute of Electrical and Electronics Engineers. 2005. p. 205-208