Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors

H. Huang, Yinong Liu, Xiao Hu, Mark Bush, K.J. Winchester, Charles Musca, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paperpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publication2004 Conference on Optoelectronic and Microelectronic Materials and Devices
EditorsAleksandar D Rakic, Yew Tong Yeow
Place of PublicationUnited States
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages205-208
Volume1
EditionBrisbane, Australia
ISBN (Print)10972137
Publication statusPublished - 2005
EventMechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors - Brisbane, Australia
Duration: 1 Jan 2005 → …

Conference

ConferenceMechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors
Period1/01/05 → …

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