Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang; S. Liu; John Dell; Lorenzo Faraone

Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang, S. Liu, John Dell, Lorenzo Faraone

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007
Editors	Hark Hoe Tan, Jung-Chih Chiao, Lorenzo Faraone, Chennupati Jagadish, Jim Williams, Alan R. Wilson
Place of Publication	United States of America
Publisher	SPIE
Pages	68000R-1-68000R-8
Volume	6800 on CD-ROM
Edition	Canberra, ACT, Australia
ISBN (Print)	9780819469748
Publication status	Published - 2007
Event	Mechanical characteristics of filter structures for MEMS adaptive infrared detectors - Canberra, ACT, Australia Duration: 1 Jan 2007 → …

Conference

Conference	Mechanical characteristics of filter structures for MEMS adaptive infrared detectors
Period	1/01/07 → …

Cite this

Huang, H., Liu, S., Dell, J., & Faraone, L. (2007). Mechanical characteristics of filter structures for MEMS adaptive infrared detectors. In H. H. Tan, J.-C. Chiao, L. Faraone, C. Jagadish, J. Williams, & A. R. Wilson (Eds.), Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007 (Canberra, ACT, Australia ed., Vol. 6800 on CD-ROM, pp. 68000R-1-68000R-8). SPIE.

Huang, H. ; Liu, S. ; Dell, John et al. / Mechanical characteristics of filter structures for MEMS adaptive infrared detectors. Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007. editor / Hark Hoe Tan ; Jung-Chih Chiao ; Lorenzo Faraone ; Chennupati Jagadish ; Jim Williams ; Alan R. Wilson. Vol. 6800 on CD-ROM Canberra, ACT, Australia. ed. United States of America : SPIE, 2007. pp. 68000R-1-68000R-8

@inproceedings{8e13e842a59e4f2aaa98a2a668185f4e,

title = "Mechanical characteristics of filter structures for MEMS adaptive infrared detectors",

author = "H. Huang and S. Liu and John Dell and Lorenzo Faraone",

year = "2007",

language = "English",

isbn = "9780819469748",

volume = "6800 on CD-ROM",

pages = "68000R--1--68000R--8",

editor = "Tan, {Hark Hoe} and Jung-Chih Chiao and Lorenzo Faraone and Chennupati Jagadish and Jim Williams and Wilson, {Alan R.}",

booktitle = "Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007",

publisher = "SPIE",

address = "United States",

edition = "Canberra, ACT, Australia",

note = "Mechanical characteristics of filter structures for MEMS adaptive infrared detectors ; Conference date: 01-01-2007",

}

Huang, H, Liu, S, Dell, J & Faraone, L 2007, Mechanical characteristics of filter structures for MEMS adaptive infrared detectors. in HH Tan, J-C Chiao, L Faraone, C Jagadish, J Williams & AR Wilson (eds), Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007. Canberra, ACT, Australia edn, vol. 6800 on CD-ROM, SPIE, United States of America, pp. 68000R-1-68000R-8, Mechanical characteristics of filter structures for MEMS adaptive infrared detectors, 1/01/07.

Mechanical characteristics of filter structures for MEMS adaptive infrared detectors. / Huang, H.; Liu, S.; Dell, John et al.
Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007. ed. / Hark Hoe Tan; Jung-Chih Chiao; Lorenzo Faraone; Chennupati Jagadish; Jim Williams; Alan R. Wilson. Vol. 6800 on CD-ROM Canberra, ACT, Australia. ed. United States of America: SPIE, 2007. p. 68000R-1-68000R-8.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

AU - Huang, H.

AU - Liu, S.

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2007

Y1 - 2007

M3 - Conference paper

SN - 9780819469748

VL - 6800 on CD-ROM

SP - 68000R-1-68000R-8

BT - Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007

A2 - Tan, Hark Hoe

A2 - Chiao, Jung-Chih

A2 - Faraone, Lorenzo

A2 - Jagadish, Chennupati

A2 - Williams, Jim

A2 - Wilson, Alan R.

PB - SPIE

CY - United States of America

T2 - Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

Y2 - 1 January 2007

ER -

Huang H, Liu S, Dell J , Faraone L. Mechanical characteristics of filter structures for MEMS adaptive infrared detectors. In Tan HH, Chiao JC, Faraone L, Jagadish C, Williams J, Wilson AR, editors, Proceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007. Canberra, ACT, Australia ed. Vol. 6800 on CD-ROM. United States of America: SPIE. 2007. p. 68000R-1-68000R-8