Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang, S. Liu, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of SPIE on CD-ROM Microelectronics, MEMS, and Nanotechnology 2007
EditorsHark Hoe Tan, Jung-Chih Chiao, Lorenzo Faraone, Chennupati Jagadish, Jim Williams, Alan R. Wilson
Place of PublicationUnited States of America
PublisherSPIE
Pages68000R-1-68000R-8
Volume6800 on CD-ROM
EditionCanberra, ACT, Australia
ISBN (Print)9780819469748
Publication statusPublished - 2007
EventMechanical characteristics of filter structures for MEMS adaptive infrared detectors - Canberra, ACT, Australia
Duration: 1 Jan 2007 → …

Conference

ConferenceMechanical characteristics of filter structures for MEMS adaptive infrared detectors
Period1/01/07 → …

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