Mechanical characterisation of amorphous Si-based thin films for large area MEMS

Kirsten Lynne Brookshire

    Research output: ThesisDoctoral Thesis

    944 Downloads (Pure)


    This thesis presents a study of the mechanical and chemical properties of inductively-coupled plasma enhanced chemical vapour deposited a-Si:H and biased target ion-beam deposited a-SixGe1-x thin films, and the mechanical performance of large area Fabry-Perot type filters constructed from these films. The thin film properties are studied by means of thin film induced substrate curvature, nanoindentation , cantilever vibration , and microbridge fracture. The mechanical performance of the designed Fabry-Perot filters is analysed via finite element modelling. This study has led to the achievement of a tunable filter of unprecedented large area and capability of IR imaging over a wide temperature range down to cryogenic temperatures.
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • The University of Western Australia
    Award date4 Apr 2017
    Publication statusUnpublished - 2016

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