Mechanical characterisation of amorphous Si-based thin films for large area MEMS

Kirsten Lynne Brookshire

Mechanical characterisation of amorphous Si-based thin films for large area MEMS

Kirsten Lynne Brookshire

Research output: Thesis › Doctoral Thesis

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Abstract

This thesis presents a study of the mechanical and chemical properties of inductively-coupled plasma enhanced chemical vapour deposited a-Si:H and biased target ion-beam deposited a-SixGe1-x thin films, and the mechanical performance of large area Fabry-Perot type filters constructed from these films. The thin film properties are studied by means of thin film induced substrate curvature, nanoindentation , cantilever vibration , and microbridge fracture. The mechanical performance of the designed Fabry-Perot filters is analysed via finite element modelling. This study has led to the achievement of a tunable filter of unprecedented large area and capability of IR imaging over a wide temperature range down to cryogenic temperatures.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	The University of Western Australia
Supervisors/Advisors	Martyniuk, Mariusz, Supervisor Silva, Dilusha, Supervisor Liu, Yinong, Supervisor Faraone, Lorenzo, Supervisor
Award date	4 Apr 2017
Publication status	Unpublished - 2016

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THESIS - DOCTOR OF PHILOSOPHY - BROOKSHIRE Kirsten Lynne - 2016
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title = "Mechanical characterisation of amorphous Si-based thin films for large area MEMS",

abstract = "This thesis presents a study of the mechanical and chemical properties of inductively-coupled plasma enhanced chemical vapour deposited a-Si:H and biased target ion-beam deposited a-SixGe1-x thin films, and the mechanical performance of large area Fabry-Perot type filters constructed from these films. The thin film properties are studied by means of thin film induced substrate curvature, nanoindentation , cantilever vibration , and microbridge fracture. The mechanical performance of the designed Fabry-Perot filters is analysed via finite element modelling. This study has led to the achievement of a tunable filter of unprecedented large area and capability of IR imaging over a wide temperature range down to cryogenic temperatures.",

keywords = "MEMS, MOEMS, Si-Ge, Fabry-Perot, Amorphous Si, Mechanical properties, Microspectrometer",

author = "Brookshire, {Kirsten Lynne}",

year = "2016",

language = "English",

school = "The University of Western Australia",

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TY - BOOK

T1 - Mechanical characterisation of amorphous Si-based thin films for large area MEMS

AU - Brookshire, Kirsten Lynne

PY - 2016

Y1 - 2016

N2 - This thesis presents a study of the mechanical and chemical properties of inductively-coupled plasma enhanced chemical vapour deposited a-Si:H and biased target ion-beam deposited a-SixGe1-x thin films, and the mechanical performance of large area Fabry-Perot type filters constructed from these films. The thin film properties are studied by means of thin film induced substrate curvature, nanoindentation , cantilever vibration , and microbridge fracture. The mechanical performance of the designed Fabry-Perot filters is analysed via finite element modelling. This study has led to the achievement of a tunable filter of unprecedented large area and capability of IR imaging over a wide temperature range down to cryogenic temperatures.

AB - This thesis presents a study of the mechanical and chemical properties of inductively-coupled plasma enhanced chemical vapour deposited a-Si:H and biased target ion-beam deposited a-SixGe1-x thin films, and the mechanical performance of large area Fabry-Perot type filters constructed from these films. The thin film properties are studied by means of thin film induced substrate curvature, nanoindentation , cantilever vibration , and microbridge fracture. The mechanical performance of the designed Fabry-Perot filters is analysed via finite element modelling. This study has led to the achievement of a tunable filter of unprecedented large area and capability of IR imaging over a wide temperature range down to cryogenic temperatures.

KW - MEMS

KW - MOEMS

KW - Si-Ge

KW - Fabry-Perot

KW - Amorphous Si

KW - Mechanical properties

KW - Microspectrometer

M3 - Doctoral Thesis

ER -

Mechanical characterisation of amorphous Si-based thin films for large area MEMS

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