Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detectors

Jarek Antoszewski, K.J. Winchester, Thuyen Nguyen, Adrian Keating, Dilusha Silva, Charles Musca, John Dell, Lorenzo Faraone

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10 Citations (Scopus)
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The materials and processes for fabrication of monolithicallyintegrated microelectromechanical systems-based microspectrometersoperating in the short-wavelength IR range ispresented. Using low-temperature surface micromachining techniques,compatible with a range of IR sensor technologies, siliconnitride-based tunable Fabry–Perot filter structures with distributedBragg mirrorsmade ofGe/SiO/Ge layers have been monolithicallyintegrated with HgCdTe photoconductors. The stresswithin and between themany layers of the structure has been eliminatedor compensated by stress tuning of the deposition conditions.The demonstrated microspectrometers have a tuning range of 1.8–2.2 μm with relative peak transmission of 70% and full-width athalf-maximum of 80 ± 10 nm.
Original languageEnglish
Pages (from-to)1031-1041
JournalIEEE Journal of Selected Topics in Quantum Electronics
Issue number4
Publication statusPublished - 2008


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