@inproceedings{fbe8f7e1f2e94a93aaadc1ce7eab1f78,
title = "Macromodel for the transient simulation of electrostatically actuated fixed-fixed beams",
author = "Mohamad Susli and Farid Boussaid and Dilusha Silva and Lorenzo Faraone and John Dell",
year = "2013",
doi = "10.1109/CircuitsAndSystems.2013.6671624",
language = "English",
isbn = "9781479913374",
volume = "NA",
pages = "130--134",
booktitle = "IEEE International Conference on Circuits and Systems (ICCAS2013)",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
note = "2013 IEEE International Conference on Circuits and Systems, ICCAS ; Conference date: 18-09-2013 Through 19-09-2013",
}