@inproceedings{fba95c8c4075438091dfd1024da3bcdd,
title = "Low Voltage Microanalysis of Focused Ion Beam Implanted Samples in the ESEM",
author = "T.C. Baroni and Brendan Griffin and F.J. Lincoln",
year = "2002",
language = "English",
isbn = "095804080X",
volume = "One",
pages = "113--114",
editor = "J. Terlet and P. Self and M. Henderson and M. Dayman",
booktitle = "17th Australian Conference on Electron Microscopy",
publisher = "Australian Society for Electron Microscopy Inc.",
edition = "Adelaide, South Australia",
note = "Low Voltage Microanalysis of Focused Ion Beam Implanted Samples in the ESEM ; Conference date: 01-01-2002",
}