@inproceedings{136d68d89aa0404882fc436257759b8b,
title = "Low Temperature Through-Wafer Reactive Ion Etching for MEMS",
author = "Michal Zawierta and Jarek Antoszewski and Mariusz Martyniuk and Adrian Keating and Dilusha Silva and Gino Putrino and R. Jeffery and Lorenzo Faraone",
year = "2014",
language = "English",
isbn = "9781479968671",
volume = "1",
pages = "83--86",
booktitle = "Proceedings of the 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD 2014)",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
note = "Low Temperature Through-Wafer Reactive Ion Etching for MEMS ; Conference date: 01-01-2014",
}