Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching

A. Baharin, Roshani Pinto, U.K. Mishra, Brett Nener, Giacinta Parish

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@article{14a2bf8188c04cb3b085060c7835f4fc,

title = "Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching",

author = "A. Baharin and Roshani Pinto and U.K. Mishra and Brett Nener and Giacinta Parish",

year = "2011",

doi = "10.1016/j.tsf.2011.01.276",

language = "English",

volume = "519",

pages = "3686--3689",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching

AU - Baharin, A.

AU - Pinto, Roshani

AU - Mishra, U.K.

AU - Nener, Brett

AU - Parish, Giacinta

PY - 2011

Y1 - 2011

U2 - 10.1016/j.tsf.2011.01.276

DO - 10.1016/j.tsf.2011.01.276

M3 - Article

SN - 0040-6090

VL - 519

SP - 3686

EP - 3689

JO - Thin Solid Films

JF - Thin Solid Films

ER -