Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching

A. Baharin, Roshani Pinto, U.K. Mishra, Brett Nener, Giacinta Parish

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)3686-3689
JournalThin Solid Films
Volume519
DOIs
Publication statusPublished - 2011

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