Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment

Research output: Chapter in Book/Conference paperConference paper

3 Citations (Scopus)
Original languageEnglish
Title of host publicationConference on Optoelectronic and Microelectronic Materials and Devices
Place of PublicationPerth, Western Australia
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages160-163
Volume1
Publication statusPublished - 2014
Event2014 Conference on Optoelectronic and Microelectronic Materials and Devices - University of Western Australia, Perth, Australia
Duration: 14 Dec 201417 Dec 2014

Conference

Conference2014 Conference on Optoelectronic and Microelectronic Materials and Devices
Abbreviated titleCOMMAD 2014
CountryAustralia
CityPerth
Period14/12/1417/12/14

Cite this

Brookshire, K., Martyniuk, M., Silva, D., Liu, Y., & Faraone, L. (2014). Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment. In Conference on Optoelectronic and Microelectronic Materials and Devices (Vol. 1, pp. 160-163). IEEE, Institute of Electrical and Electronics Engineers.