Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	Conference on Optoelectronic and Microelectronic Materials and Devices
Place of Publication	Perth, Western Australia
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	160-163
Volume	1
Publication status	Published - 2014
Event	2014 Conference on Optoelectronic and Microelectronic Materials and Devices - University of Western Australia, Perth, Australia Duration: 14 Dec 2014 → 17 Dec 2014

Conference	2014 Conference on Optoelectronic and Microelectronic Materials and Devices
Abbreviated title	COMMAD 2014
Country/Territory	Australia
City	Perth
Period	14/12/14 → 17/12/14

Cite this

@inproceedings{fc980d31f3ee4260abf8e822e2f412b9,

title = "Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment",

author = "Kirsten Brookshire and Mariusz Martyniuk and Dilusha Silva and Yinong Liu and Lorenzo Faraone",

year = "2014",

language = "English",

volume = "1",

pages = "160--163",

booktitle = "Conference on Optoelectronic and Microelectronic Materials and Devices",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 ; Conference date: 14-12-2014 Through 17-12-2014",

}

Brookshire, K, Martyniuk, M , Silva, D , Liu, Y & Faraone, L 2014, Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment. in Conference on Optoelectronic and Microelectronic Materials and Devices. vol. 1, IEEE, Institute of Electrical and Electronics Engineers, Perth, Western Australia, pp. 160-163, 2014 Conference on Optoelectronic and Microelectronic Materials and Devices, Perth, Australia, 14/12/14.

Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment. / Brookshire, Kirsten; Martyniuk, Mariusz ; Silva, Dilusha et al.
Conference on Optoelectronic and Microelectronic Materials and Devices. Vol. 1 Perth, Western Australia: IEEE, Institute of Electrical and Electronics Engineers, 2014. p. 160-163.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment

AU - Brookshire, Kirsten

AU - Martyniuk, Mariusz

AU - Silva, Dilusha

AU - Liu, Yinong

AU - Faraone, Lorenzo

PY - 2014

Y1 - 2014

M3 - Conference paper

VL - 1

SP - 160

EP - 163

BT - Conference on Optoelectronic and Microelectronic Materials and Devices

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Perth, Western Australia

T2 - 2014 Conference on Optoelectronic and Microelectronic Materials and Devices

Y2 - 14 December 2014 through 17 December 2014

ER -