Fingerprint
Dive into the research topics of 'Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures
Mariusz Martyniuk, Charles Musca, John Dell, Lorenzo Faraone
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)