Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures

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    Abstract

    Optical measurements of thin-film-stress-induced substrate bending have been employed in a characterization of long-term environmental stability of stress of low-temperature (
    Original languageEnglish
    Pages (from-to)26-30
    JournalMaterials Science and Engineering B
    Volume163
    DOIs
    Publication statusPublished - 2009

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    residual stress
    Residual stresses
    Thin films
    thin films
    optical measurement
    Temperature
    Substrates

    Cite this

    @article{0008836604aa4871861862f6514f5e49,
    title = "Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures",
    abstract = "Optical measurements of thin-film-stress-induced substrate bending have been employed in a characterization of long-term environmental stability of stress of low-temperature (",
    author = "Mariusz Martyniuk and Charles Musca and John Dell and Lorenzo Faraone",
    year = "2009",
    doi = "10.1016/j.mseb.2009.04.019",
    language = "English",
    volume = "163",
    pages = "26--30",
    journal = "Materials Science and Engineering B",
    issn = "0921-5107",
    publisher = "Elsevier",

    }

    TY - JOUR

    T1 - Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures

    AU - Martyniuk, Mariusz

    AU - Musca, Charles

    AU - Dell, John

    AU - Faraone, Lorenzo

    PY - 2009

    Y1 - 2009

    N2 - Optical measurements of thin-film-stress-induced substrate bending have been employed in a characterization of long-term environmental stability of stress of low-temperature (

    AB - Optical measurements of thin-film-stress-induced substrate bending have been employed in a characterization of long-term environmental stability of stress of low-temperature (

    U2 - 10.1016/j.mseb.2009.04.019

    DO - 10.1016/j.mseb.2009.04.019

    M3 - Article

    VL - 163

    SP - 26

    EP - 30

    JO - Materials Science and Engineering B

    JF - Materials Science and Engineering B

    SN - 0921-5107

    ER -