Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy

Jorge Silva Castillo

doi:10.26182/s9qk-tp53

Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy

Jorge Silva Castillo

Research output: Thesis › Doctoral Thesis

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Abstract

This thesis achieved the realization of Si-based large (millimetre scale) MEMS Fabry-Pérot tunable infrared filters for multispectral single-point-sensing, and imaging applications. Although, spectral measurements on fabricated Fabry-Perot actuated filters show good agreement with optical simulations the filter performance indicates there is a lager peak to peak surface variation within the main air optical cavity. The fabricated Fabry-Perot filters demonstrate peak transmittance values between 38% and 50%, with measured full width at half maximum values in the range of 70 nm making them promising devices for use in spectral sensing and imaging in the MWIR wavelength ranges.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	The University of Western Australia
Supervisors/Advisors	Faraone, Lorenzo, Supervisor Putrino, Gino, Supervisor Silva, Dilusha, Supervisor
Thesis sponsors	Australian Government Research Training Program
Award date	25 Aug 2023
DOIs	https://doi.org/10.26182/s9qk-tp53
Publication status	Unpublished - 2023

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10.26182/s9qk-tp53

THESIS - DOCTOR OF PHILOSOPHY - SILVA CASTILLO Jorge Rafael - 2023
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Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile
Silva, J. R., Kala, H., Tripathi, D. K., Papanastasiou, K., Silva, K. K. M. B. D., Putrino, G., Martyniuk, M., Keating, A., Antoszewski, J. & Faraone, L., Jul 2021, In: Journal of Micromechanics and Microengineering. 31, 7, 075001.
Research output: Contribution to journal › Article › peer-review
1 Link opens in a new tab Citation (Scopus)
Large area silicon-air-silicon DBRs for infrared filter applications
Silva , J., Kala, H., Tripathi, D., Silva, B., Martyniuk, M., Keating, A., Putrino, G. & Faraone, L., 1 Feb 2019, In: Journal of Lightwave Technology. 37, 3, p. 769-779 11 p., 8532288.
Research output: Contribution to journal › Article › peer-review

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Cite this

@phdthesis{bc6573638865461398a2c1e8006f1578,

title = "Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy",

abstract = "This thesis achieved the realization of Si-based large (millimetre scale) MEMS Fabry-P{\'e}rot tunable infrared filters for multispectral single-point-sensing, and imaging applications. Although, spectral measurements on fabricated Fabry-Perot actuated filters show good agreement with optical simulations the filter performance indicates there is a lager peak to peak surface variation within the main air optical cavity. The fabricated Fabry-Perot filters demonstrate peak transmittance values between 38\% and 50\%, with measured full width at half maximum values in the range of 70 nm making them promising devices for use in spectral sensing and imaging in the MWIR wavelength ranges.",

keywords = "MEMS, Fabry-P{\'e}rot, optical, filter, Infrared, Silicon, MWIR",

author = "\{Silva Castillo\}, Jorge",

year = "2023",

doi = "10.26182/s9qk-tp53",

language = "English",

school = "The University of Western Australia",

}

TY - BOOK

T1 - Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy

AU - Silva Castillo, Jorge

PY - 2023

Y1 - 2023

N2 - This thesis achieved the realization of Si-based large (millimetre scale) MEMS Fabry-Pérot tunable infrared filters for multispectral single-point-sensing, and imaging applications. Although, spectral measurements on fabricated Fabry-Perot actuated filters show good agreement with optical simulations the filter performance indicates there is a lager peak to peak surface variation within the main air optical cavity. The fabricated Fabry-Perot filters demonstrate peak transmittance values between 38% and 50%, with measured full width at half maximum values in the range of 70 nm making them promising devices for use in spectral sensing and imaging in the MWIR wavelength ranges.

AB - This thesis achieved the realization of Si-based large (millimetre scale) MEMS Fabry-Pérot tunable infrared filters for multispectral single-point-sensing, and imaging applications. Although, spectral measurements on fabricated Fabry-Perot actuated filters show good agreement with optical simulations the filter performance indicates there is a lager peak to peak surface variation within the main air optical cavity. The fabricated Fabry-Perot filters demonstrate peak transmittance values between 38% and 50%, with measured full width at half maximum values in the range of 70 nm making them promising devices for use in spectral sensing and imaging in the MWIR wavelength ranges.

KW - MEMS

KW - Fabry-Pérot

KW - optical

KW - filter

KW - Infrared

KW - Silicon

KW - MWIR

U2 - 10.26182/s9qk-tp53

DO - 10.26182/s9qk-tp53

M3 - Doctoral Thesis

ER -

Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy

Abstract

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Research output

Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile

Large area silicon-air-silicon DBRs for infrared filter applications

Cite this