Large area silicon-based MEMS tunable Fabry-Perot filters for infrared spectroscopy

Jorge Silva Castillo

Research output: ThesisDoctoral Thesis

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This thesis achieved the realization of Si-based large (millimetre scale) MEMS Fabry-Pérot tunable infrared filters for multispectral single-point-sensing, and imaging applications. Although, spectral measurements on fabricated Fabry-Perot actuated filters show good agreement with optical simulations the filter performance indicates there is a lager peak to peak surface variation within the main air optical cavity. The fabricated Fabry-Perot filters demonstrate peak transmittance values between 38% and 50%, with measured full width at half maximum values in the range of 70 nm making them promising devices for use in spectral sensing and imaging in the MWIR wavelength ranges.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • The University of Western Australia
  • Faraone, Lorenzo, Supervisor
  • Putrino, Gino, Supervisor
  • Silva, Dilusha, Supervisor
Thesis sponsors
Award date25 Aug 2023
Publication statusUnpublished - 2023

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