Large area silicon-air-silicon DBRs for infrared filter applications

Jorge Silva; Hemendra Kala; Dhirendra Tripathi; Buddhika Silva; Mariusz Martyniuk; Adrian Keating; Gino Putrino; Lorenzo Faraone

doi:10.1109/JLT.2018.2880910

Large area silicon-air-silicon DBRs for infrared filter applications

Jorge Silva , Hemendra Kala, Dhirendra Tripathi, Buddhika Silva, Mariusz Martyniuk, Adrian Keating, Gino Putrino, Lorenzo Faraone

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Abstract

This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

Original language	English
Article number	8532288
Pages (from-to)	769-779
Number of pages	11
Journal	Journal of Lightwave Technology
Volume	37
Issue number	3
Early online date	12 Nov 2018
DOIs	https://doi.org/10.1109/JLT.2018.2880910
Publication status	Published - 1 Feb 2019

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Silva et al 2018 Large area silicon-air-siliconAccepted author manuscript, 963 KB

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title = "Large area silicon-air-silicon DBRs for infrared filter applications",

abstract = "This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.",

keywords = "Fabry-Perot interferometers, SPECTROSCOPY, Silicon, optical sensors, Filters",

author = "Jorge Silva and Hemendra Kala and Dhirendra Tripathi and Buddhika Silva and Mariusz Martyniuk and Adrian Keating and Gino Putrino and Lorenzo Faraone",

year = "2019",

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AU - Silva , Jorge

AU - Kala, Hemendra

AU - Tripathi, Dhirendra

AU - Silva, Buddhika

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Putrino, Gino

AU - Faraone, Lorenzo

PY - 2019/2/1

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N2 - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

AB - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

KW - Fabry-Perot interferometers

KW - SPECTROSCOPY

KW - Silicon

KW - optical sensors

KW - Filters

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