Large area silicon-air-silicon DBRs for infrared filter applications

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Abstract

This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.
Original languageEnglish
Article number8532288
Pages (from-to)769-779
Number of pages11
JournalJournal of Lightwave Technology
Volume37
Issue number3
Early online date12 Nov 2018
DOIs
Publication statusPublished - 1 Feb 2019

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infrared filters
filters
air
silicon
Bragg reflectors
wavelengths
transmittance
refractivity
fabrication
thin films
simulation

Cite this

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title = "Large area silicon-air-silicon DBRs for infrared filter applications",
abstract = "This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50{\%} across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.",
keywords = "Fabry-Perot interferometers, SPECTROSCOPY, Silicon, optical sensors, Filters",
author = "Jorge Silva and Hemendra Kala and Dhirendra Tripathi and Buddhika Silva and Mariusz Martyniuk and Adrian Keating and Gino Putrino and Lorenzo Faraone",
year = "2019",
month = "2",
day = "1",
doi = "10.1109/JLT.2018.2880910",
language = "English",
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pages = "769--779",
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publisher = "IEEE, Institute of Electrical and Electronics Engineers",
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TY - JOUR

T1 - Large area silicon-air-silicon DBRs for infrared filter applications

AU - Silva , Jorge

AU - Kala, Hemendra

AU - Tripathi, Dhirendra

AU - Silva, Buddhika

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Putrino, Gino

AU - Faraone, Lorenzo

PY - 2019/2/1

Y1 - 2019/2/1

N2 - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

AB - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

KW - Fabry-Perot interferometers

KW - SPECTROSCOPY

KW - Silicon

KW - optical sensors

KW - Filters

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