Abstract
| Original language | English |
|---|---|
| Article number | 8532288 |
| Pages (from-to) | 769-779 |
| Number of pages | 11 |
| Journal | Journal of Lightwave Technology |
| Volume | 37 |
| Issue number | 3 |
| Early online date | 12 Nov 2018 |
| DOIs | |
| Publication status | Published - 1 Feb 2019 |
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Large area silicon-air-silicon DBRs for infrared filter applications. / Silva , Jorge; Kala, Hemendra; Tripathi, Dhirendra; Silva, Buddhika; Martyniuk, Mariusz; Keating, Adrian; Putrino, Gino; Faraone, Lorenzo.
In: Journal of Lightwave Technology, Vol. 37, No. 3, 8532288, 01.02.2019, p. 769-779.Research output: Contribution to journal › Article
TY - JOUR
T1 - Large area silicon-air-silicon DBRs for infrared filter applications
AU - Silva , Jorge
AU - Kala, Hemendra
AU - Tripathi, Dhirendra
AU - Silva, Buddhika
AU - Martyniuk, Mariusz
AU - Keating, Adrian
AU - Putrino, Gino
AU - Faraone, Lorenzo
PY - 2019/2/1
Y1 - 2019/2/1
N2 - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.
AB - This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry-Perot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5-2.5 μm) and mid-wave infrared (MWIR: 3-5 μm) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm 1 mm. Spectral measurements on released Fabry-Perot filters show excellent agreement with optical simulations. The fabricated Fabry-Perot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.
KW - Fabry-Perot interferometers
KW - SPECTROSCOPY
KW - Silicon
KW - optical sensors
KW - Filters
UR - https://www-scopus-com.ezproxy.library.uwa.edu.au/record/display.uri?eid=2-s2.0-85056323681&origin=resultslist&sort=plf-f&src=s&st1=Large+area+silicon-air-silicon+DBRs+for+infrared+filter+applications&st2=&sid=d79ab21bb32970332e6591eb91eca94d&sot=b&sdt=b&sl=83&s=TITLE-ABS-KEY%28Large+area+silicon-air-silicon+DBRs+for+infrared+filter+applications%29&relpos=0&citeCnt=0&searchTerm=
U2 - 10.1109/JLT.2018.2880910
DO - 10.1109/JLT.2018.2880910
M3 - Article
VL - 37
SP - 769
EP - 779
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
SN - 0733-8724
IS - 3
M1 - 8532288
ER -