Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging

Haifeng Mao, Dhirendra Kumar Tripathi, Yongling Ren, K. K.M.B.Dilusha Silva, Mariusz Martyniuk, Jarek Antoszewski, John Bumgarner, John M. Dell, Lorenzo Faraone

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3% across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.

    Original languageEnglish
    Article number7795210
    JournalIEEE Journal on Selected Topics in Quantum Electronics
    Volume23
    Issue number2
    DOIs
    Publication statusPublished - 1 Mar 2017

    Fingerprint

    Infrared imaging
    microelectromechanical systems
    MEMS
    Membranes
    filters
    membranes
    Imaging techniques
    Wavelength
    Mirrors
    Tuning
    flatness
    Spectral resolution
    tuning
    Light transmission
    wavelengths
    mirrors
    Germanium
    tunable filters
    Hyperspectral imaging
    spectral resolution

    Cite this

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    title = "Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging",
    abstract = "This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3{\%} across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.",
    keywords = "Fabry-Perot interferometers, hyperspectral/multispectral infrared imaging, MEMS",
    author = "Haifeng Mao and Tripathi, {Dhirendra Kumar} and Yongling Ren and Silva, {K. K.M.B.Dilusha} and Mariusz Martyniuk and Jarek Antoszewski and John Bumgarner and Dell, {John M.} and Lorenzo Faraone",
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    language = "English",
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    Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging. / Mao, Haifeng; Tripathi, Dhirendra Kumar; Ren, Yongling; Silva, K. K.M.B.Dilusha; Martyniuk, Mariusz; Antoszewski, Jarek; Bumgarner, John; Dell, John M.; Faraone, Lorenzo.

    In: IEEE Journal on Selected Topics in Quantum Electronics, Vol. 23, No. 2, 7795210, 01.03.2017.

    Research output: Contribution to journalArticle

    TY - JOUR

    T1 - Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging

    AU - Mao, Haifeng

    AU - Tripathi, Dhirendra Kumar

    AU - Ren, Yongling

    AU - Silva, K. K.M.B.Dilusha

    AU - Martyniuk, Mariusz

    AU - Antoszewski, Jarek

    AU - Bumgarner, John

    AU - Dell, John M.

    AU - Faraone, Lorenzo

    PY - 2017/3/1

    Y1 - 2017/3/1

    N2 - This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3% across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.

    AB - This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3% across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.

    KW - Fabry-Perot interferometers

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    KW - MEMS

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