Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wave Infrared Hyperspectral Imaging Applications

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    Abstract

    We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm×200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays from the short-wave infrared wavelength ranges (1500–3000 nm) to mid-wave infrared wavelength (3000–6000 nm) ranges. Surface optical profile measurements indicate a flatness of the order of 20–30 nm in the fabricated structures across several millimetres. Single point spectral measurements on devices show excellent agreement with simulated optical models. The fabricated distributed Bragg reflectors show ∼94 % reflectivity, which is in close agreement with theoretical reflectivity. The demonstrated high reflectivity across a wide wavelength range renders them suitable as broadband reflectors. Finally, we present optical transmittance modeling results for Fabry-Pérot filters based on these distributed Bragg reflectors.
    Original languageEnglish
    Pages (from-to)2136-2144
    Number of pages9
    JournalIEEE Journal of Microelectromechanical Systems
    Volume24
    Issue number6
    Early online date25 Sep 2015
    DOIs
    Publication statusPublished - 6 Dec 2015

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    Distributed Bragg reflectors
    Infrared imaging
    MEMS
    Wavelength
    Focal plane arrays
    Infrared radiation
    Silicon
    Opacity
    Photodetectors
    Fabrication
    Hyperspectral imaging
    Sensors
    Air

    Cite this

    @article{0451ae5c243e4aca90ecf34d9a7a730d,
    title = "Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wave Infrared Hyperspectral Imaging Applications",
    abstract = "We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm×200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays from the short-wave infrared wavelength ranges (1500–3000 nm) to mid-wave infrared wavelength (3000–6000 nm) ranges. Surface optical profile measurements indicate a flatness of the order of 20–30 nm in the fabricated structures across several millimetres. Single point spectral measurements on devices show excellent agreement with simulated optical models. The fabricated distributed Bragg reflectors show ∼94 {\%} reflectivity, which is in close agreement with theoretical reflectivity. The demonstrated high reflectivity across a wide wavelength range renders them suitable as broadband reflectors. Finally, we present optical transmittance modeling results for Fabry-P{\'e}rot filters based on these distributed Bragg reflectors.",
    author = "Dhirendra Tripathi and H. Mao and Dilusha Silva and John Bumgarner and Mariusz Martyniuk and John Dell and Lorenzo Faraone",
    year = "2015",
    month = "12",
    day = "6",
    doi = "10.1109/JMEMS.2015.2477853",
    language = "English",
    volume = "24",
    pages = "2136--2144",
    journal = "Journal of Microelectromechanical Systems",
    issn = "1057-7157",
    publisher = "IEEE, Institute of Electrical and Electronics Engineers",
    number = "6",

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    TY - JOUR

    T1 - Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wave Infrared Hyperspectral Imaging Applications

    AU - Tripathi, Dhirendra

    AU - Mao, H.

    AU - Silva, Dilusha

    AU - Bumgarner, John

    AU - Martyniuk, Mariusz

    AU - Dell, John

    AU - Faraone, Lorenzo

    PY - 2015/12/6

    Y1 - 2015/12/6

    N2 - We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm×200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays from the short-wave infrared wavelength ranges (1500–3000 nm) to mid-wave infrared wavelength (3000–6000 nm) ranges. Surface optical profile measurements indicate a flatness of the order of 20–30 nm in the fabricated structures across several millimetres. Single point spectral measurements on devices show excellent agreement with simulated optical models. The fabricated distributed Bragg reflectors show ∼94 % reflectivity, which is in close agreement with theoretical reflectivity. The demonstrated high reflectivity across a wide wavelength range renders them suitable as broadband reflectors. Finally, we present optical transmittance modeling results for Fabry-Pérot filters based on these distributed Bragg reflectors.

    AB - We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm×200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays from the short-wave infrared wavelength ranges (1500–3000 nm) to mid-wave infrared wavelength (3000–6000 nm) ranges. Surface optical profile measurements indicate a flatness of the order of 20–30 nm in the fabricated structures across several millimetres. Single point spectral measurements on devices show excellent agreement with simulated optical models. The fabricated distributed Bragg reflectors show ∼94 % reflectivity, which is in close agreement with theoretical reflectivity. The demonstrated high reflectivity across a wide wavelength range renders them suitable as broadband reflectors. Finally, we present optical transmittance modeling results for Fabry-Pérot filters based on these distributed Bragg reflectors.

    U2 - 10.1109/JMEMS.2015.2477853

    DO - 10.1109/JMEMS.2015.2477853

    M3 - Article

    VL - 24

    SP - 2136

    EP - 2144

    JO - Journal of Microelectromechanical Systems

    JF - Journal of Microelectromechanical Systems

    SN - 1057-7157

    IS - 6

    ER -