Issues in source calibration for biased target ion beam deposition

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	COMMAD 2014 Conference Proceedings
Place of Publication	United States of America
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	141-143
Volume	N/A
ISBN (Print)	9781479968671
DOIs	https://doi.org/10.1109/COMMAD.2014.7038674
Publication status	Published - 2014
Event	Issues in source calibration for biased target ion beam deposition - Perth, Western Australia Duration: 1 Jan 2014 → …

Conference	Issues in source calibration for biased target ion beam deposition
Period	1/01/14 → …

Access to Document

@inproceedings{0a30fff982c24f02a0d5194da659b403,

title = "Issues in source calibration for biased target ion beam deposition",

author = "{Rahda Krishnan}, Radha and R.D. Jeffery and Mariusz Martyniuk and Rob Woodward and John Dell and Lorenzo Faraone",

year = "2014",

doi = "10.1109/COMMAD.2014.7038674",

language = "English",

isbn = "9781479968671",

volume = "N/A",

pages = "141--143",

booktitle = "COMMAD 2014 Conference Proceedings",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "Issues in source calibration for biased target ion beam deposition ; Conference date: 01-01-2014",

}

Rahda Krishnan, R, Jeffery, RD , Martyniuk, M, Woodward, R, Dell, J & Faraone, L 2014, Issues in source calibration for biased target ion beam deposition. in COMMAD 2014 Conference Proceedings. vol. N/A, IEEE, Institute of Electrical and Electronics Engineers, United States of America, pp. 141-143, Issues in source calibration for biased target ion beam deposition, 1/01/14. https://doi.org/10.1109/COMMAD.2014.7038674

TY - GEN

T1 - Issues in source calibration for biased target ion beam deposition

AU - Rahda Krishnan, Radha

AU - Jeffery, R.D.

AU - Martyniuk, Mariusz

AU - Woodward, Rob

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2014

Y1 - 2014

U2 - 10.1109/COMMAD.2014.7038674

DO - 10.1109/COMMAD.2014.7038674

M3 - Conference paper

SN - 9781479968671

VL - N/A

SP - 141

EP - 143

BT - COMMAD 2014 Conference Proceedings

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States of America

T2 - Issues in source calibration for biased target ion beam deposition

Y2 - 1 January 2014

ER -