Investigations of ohmic contacts to reactive-ion-etched p-type GaN

Research output: Chapter in Book/Conference paperConference paper

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III
EditorsJung-Chih Chiao, Alex J. Hariz, David N. Jamieson, Giacinta Parish, Vijay K. Varadan
Place of PublicationBellingham, Washington, USA
PublisherSPIE
Pages47-56
Volume5276
EditionPerth, Western Australia
ISBN (Print)081945169X
Publication statusPublished - 2004
EventInvestigations of ohmic contacts to reactive-ion-etched p-type GaN - Perth, Western Australia
Duration: 1 Jan 2004 → …

Conference

ConferenceInvestigations of ohmic contacts to reactive-ion-etched p-type GaN
Period1/01/04 → …

Cite this

Parish, G., Watson, L. M., Umana-Membreno, G. A., & Nener, B. (2004). Investigations of ohmic contacts to reactive-ion-etched p-type GaN. In J-C. Chiao, A. J. Hariz, D. N. Jamieson, G. Parish, & V. K. Varadan (Eds.), Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III (Perth, Western Australia ed., Vol. 5276, pp. 47-56). Bellingham, Washington, USA: SPIE.