Investigations of ohmic contacts to reactive-ion-etched p-type GaN

Giacinta Parish; L.M. Watson; Gilberto A. Umana-Membreno; Brett Nener

Investigations of ohmic contacts to reactive-ion-etched p-type GaN

Giacinta Parish, L.M. Watson, Gilberto A. Umana-Membreno, Brett Nener

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Editors	Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson, Giacinta Parish, Vijay K. Varadan
Place of Publication	Bellingham, Washington, USA
Publisher	SPIE
Pages	47-56
Volume	5276
Edition	Perth, Western Australia
ISBN (Print)	081945169X
Publication status	Published - 2004
Event	Investigations of ohmic contacts to reactive-ion-etched p-type GaN - Perth, Western Australia Duration: 1 Jan 2004 → …

Conference

Conference	Investigations of ohmic contacts to reactive-ion-etched p-type GaN
Period	1/01/04 → …

Cite this

Parish, G., Watson, L. M., Umana-Membreno, G. A., & Nener, B. (2004). Investigations of ohmic contacts to reactive-ion-etched p-type GaN. In J.-C. Chiao, A. J. Hariz, D. N. Jamieson, G. Parish, & V. K. Varadan (Eds.), Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III (Perth, Western Australia ed., Vol. 5276, pp. 47-56). SPIE.

Parish, Giacinta ; Watson, L.M. ; Umana-Membreno, Gilberto A. et al. / Investigations of ohmic contacts to reactive-ion-etched p-type GaN. Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III. editor / Jung-Chih Chiao ; Alex J. Hariz ; David N. Jamieson ; Giacinta Parish ; Vijay K. Varadan. Vol. 5276 Perth, Western Australia. ed. Bellingham, Washington, USA : SPIE, 2004. pp. 47-56

@inproceedings{4516bfec64ba45f8aced8be06c722a4c,

title = "Investigations of ohmic contacts to reactive-ion-etched p-type GaN",

author = "Giacinta Parish and L.M. Watson and Umana-Membreno, {Gilberto A.} and Brett Nener",

year = "2004",

language = "English",

isbn = "081945169X",

volume = "5276",

pages = "47--56",

editor = "Jung-Chih Chiao and Hariz, {Alex J.} and Jamieson, {David N.} and Giacinta Parish and Varadan, {Vijay K.}",

booktitle = "Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III",

publisher = "SPIE",

address = "United States",

edition = "Perth, Western Australia",

note = "Investigations of ohmic contacts to reactive-ion-etched p-type GaN ; Conference date: 01-01-2004",

}

Parish, G, Watson, LM, Umana-Membreno, GA & Nener, B 2004, Investigations of ohmic contacts to reactive-ion-etched p-type GaN. in J-C Chiao, AJ Hariz, DN Jamieson, G Parish & VK Varadan (eds), Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III. Perth, Western Australia edn, vol. 5276, SPIE, Bellingham, Washington, USA, pp. 47-56, Investigations of ohmic contacts to reactive-ion-etched p-type GaN, 1/01/04.

Investigations of ohmic contacts to reactive-ion-etched p-type GaN. / Parish, Giacinta; Watson, L.M.; Umana-Membreno, Gilberto A. et al.
Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III. ed. / Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan. Vol. 5276 Perth, Western Australia. ed. Bellingham, Washington, USA: SPIE, 2004. p. 47-56.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Investigations of ohmic contacts to reactive-ion-etched p-type GaN

AU - Parish, Giacinta

AU - Watson, L.M.

AU - Umana-Membreno, Gilberto A.

AU - Nener, Brett

PY - 2004

Y1 - 2004

M3 - Conference paper

SN - 081945169X

VL - 5276

SP - 47

EP - 56

BT - Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III

A2 - Chiao, Jung-Chih

A2 - Hariz, Alex J.

A2 - Jamieson, David N.

A2 - Parish, Giacinta

A2 - Varadan, Vijay K.

PB - SPIE

CY - Bellingham, Washington, USA

T2 - Investigations of ohmic contacts to reactive-ion-etched p-type GaN

Y2 - 1 January 2004

ER -

Parish G, Watson LM, Umana-Membreno GA , Nener B. Investigations of ohmic contacts to reactive-ion-etched p-type GaN. In Chiao JC, Hariz AJ, Jamieson DN, Parish G, Varadan VK, editors, Proceeding of SPIE: Device and Process Technologies for MEMS, Microelectronics, and Photonics III. Perth, Western Australia ed. Vol. 5276. Bellingham, Washington, USA: SPIE. 2004. p. 47-56