Abstract
Three designs of micro-optic structures have been analyzed by two-dimensional simulation. Compared with traditional spherical microlenses, the micro-optic structures have the same ability to collect radiation and do not have the disadvantages of traditional microlenses. In our analysis the micro-optic structures are simple grooved notches above the space between two adjacent mesas. We also investigate the characteristics of InSb focal-plane arrays with both spherical microlenses and micro-optic structures under oblique incident radiation. Empirical formulas were derived to describe the response and crosstalk as a function of incident radiation angle. Our results show that the micro-optic structures can be effectively used in radiation collection for InSb infrared focal-plane arrays. © 2013 TMS.
Original language | English |
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Pages (from-to) | 3181-3185 |
Journal | Journal of Electronic Materials |
Volume | 42 |
Issue number | 11 |
DOIs | |
Publication status | Published - 2013 |