Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters

Mohamad Susli

doi:10.26182/5df837b6b613d

Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters

Mohamad Susli

School of Engineering

Research output: Thesis › Doctoral Thesis

76 Downloads (Pure)

Abstract

This thesis investigated the realisation of Fabry-Perot based micro-spectrometers using surface-micromachining techniques to fabricate vertically actuated suspended mirrors and fixed-fixed beams. The thesis introduces a reduced order model of the MEMS device to develop a novel micro-spectrometer design exhibiting a separate sensing structure to achieve closed-loop control using capacitive sensing. The proposed design mitigates the challenges posed by dielectric charging and pull-in limit,which degrade the performance of the device. Finally, this thesis explores the issues associated with the monolithic integration of the sensing structure and the control circuitry.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	The University of Western Australia
Supervisors/Advisors	Bennamoun, Mohammed, Supervisor Boussaid, Farid, Supervisor
Award date	10 Nov 2019
DOIs	https://doi.org/10.26182/5df837b6b613d
Publication status	Unpublished - 2019

Access to Document

10.26182/5df837b6b613d

THESIS - DOCTOR OF PHILOSOPHY - SUSLI Mohamad - 2019
This work is protected by Copyright. You may print or download ONE copy of this document for the purpose of your own non-commercial research or study. Any other use requires permission from the copyright owner. The Copyright Act requires you to attribute any copyright works you quote or paraphrase.

Cite this

@phdthesis{42fd425bc1e54ec5854ca05d3bd2abed,

title = "Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters",

abstract = "This thesis investigated the realisation of Fabry-Perot based micro-spectrometers using surface-micromachining techniques to fabricate vertically actuated suspended mirrors and fixed-fixed beams. The thesis introduces a reduced order model of the MEMS device to develop a novel micro-spectrometer design exhibiting a separate sensing structure to achieve closed-loop control using capacitive sensing. The proposed design mitigates the challenges posed by dielectric charging and pull-in limit,which degrade the performance of the device. Finally, this thesis explores the issues associated with the monolithic integration of the sensing structure and the control circuitry.",

keywords = "micro-spectrometer, MEMS, electro-optics, capacitive sensing, material engineering, VLSI, compact model, closed-loop control",

author = "Mohamad Susli",

year = "2019",

doi = "10.26182/5df837b6b613d",

language = "English",

school = "The University of Western Australia",

}

TY - BOOK

T1 - Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters

AU - Susli, Mohamad

PY - 2019

Y1 - 2019

N2 - This thesis investigated the realisation of Fabry-Perot based micro-spectrometers using surface-micromachining techniques to fabricate vertically actuated suspended mirrors and fixed-fixed beams. The thesis introduces a reduced order model of the MEMS device to develop a novel micro-spectrometer design exhibiting a separate sensing structure to achieve closed-loop control using capacitive sensing. The proposed design mitigates the challenges posed by dielectric charging and pull-in limit,which degrade the performance of the device. Finally, this thesis explores the issues associated with the monolithic integration of the sensing structure and the control circuitry.

AB - This thesis investigated the realisation of Fabry-Perot based micro-spectrometers using surface-micromachining techniques to fabricate vertically actuated suspended mirrors and fixed-fixed beams. The thesis introduces a reduced order model of the MEMS device to develop a novel micro-spectrometer design exhibiting a separate sensing structure to achieve closed-loop control using capacitive sensing. The proposed design mitigates the challenges posed by dielectric charging and pull-in limit,which degrade the performance of the device. Finally, this thesis explores the issues associated with the monolithic integration of the sensing structure and the control circuitry.

KW - micro-spectrometer

KW - MEMS

KW - electro-optics

KW - capacitive sensing

KW - material engineering

KW - VLSI

KW - compact model

KW - closed-loop control

U2 - 10.26182/5df837b6b613d

DO - 10.26182/5df837b6b613d

M3 - Doctoral Thesis

ER -

Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters

Abstract

Access to Document

Fingerprint

Cite this