Integration and Control of Microspectrometers Based on Fabry-Perot Optical Filters

Mohamad Susli

Research output: ThesisDoctoral Thesis

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This thesis investigated the realisation of Fabry-Perot based micro-spectrometers using surface-micromachining techniques to fabricate vertically actuated suspended mirrors and fixed-fixed beams. The thesis introduces a reduced order model of the MEMS device to develop a novel micro-spectrometer design exhibiting a separate sensing structure to achieve closed-loop control using capacitive sensing. The proposed design mitigates the challenges posed by dielectric charging and pull-in limit,which degrade the performance of the device. Finally, this thesis explores the issues associated with the monolithic integration of the sensing structure and the control circuitry.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • The University of Western Australia
  • Bennamoun, Mohammed, Supervisor
  • Boussaid, Farid, Supervisor
Award date10 Nov 2019
Publication statusUnpublished - 2019


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