@inproceedings{2568a5d61f004ff580f92e54bb8c748b,
title = "Infrared and terahertz spectrally adaptive filters based on MEMS technologies",
abstract = "Future remote imaging systems promise spectroscopic functionalities extending well beyond the visible wavelengths. This allows real-time spectral information to be gathered from multiple wavelength bands which is highly attractive for numerous remote sensing spectroscopy/imaging applications and aids target recognition. This paper briefly presents a micro-electromechanical systems (MEMS) based electrically tuneable adaptive filter technology developed for the technologically important infrared (IR) bands of the electromagnetic spectrum and reports on the progress towards extension to the significantly longer wavelength THz band. The demonstrated concepts focus on merging MEMS-enabled dynamic modulation with the spectral sensitivity and selectivity of metamaterials, as well as on the possibility of adopting the rapidly evolving 3D printing technologies.",
keywords = "infrared, microelectromechanical systems, optical device fabrication, optical filters, terahertz",
author = "Mariusz Martyniuk and Silva, {K. K.M.B.Dilusha} and Hemendra Kala and Michal Zawierta and Wallace, {Vincent P.} and Konrad Walus and Lorenzo Faraone and Shadrivov, {Ilya V.}",
note = "Funding Information: This work was supported in part by the facilities of the Western Australian node of the NCRIS-enabled Australian National Fabrication Facility (ANFF), a company established under the National Collaborative Research Infrastructure Strategy (NCRIS) to provide nano and micro-fabrication facilities for Australia{\textquoteright}s researchers and support from the Western Australian Government{\textquoteright}s Department of Jobs, Tourism, Science and Innovation. This research was supported financially by Australian Research Council. The authors also thankfully acknowledge the facilities, and the scientific and technical assistance of the Centre for Microscopy, Characterisation & Analysis (CMCA); and The University of Western Australia. Publisher Copyright: {\textcopyright} 2023 SPIE.; Smart Photonic and Optoelectronic Integrated Circuits 2023 ; Conference date: 31-01-2023 Through 02-02-2023",
year = "2023",
month = mar,
day = "17",
doi = "10.1117/12.2658896",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS",
editor = "Sailing He and Sailing He and Laurent Vivien",
booktitle = "Smart Photonic and Optoelectronic Integrated Circuits 2023",
}
