Implantation angle periphery effects on non-alloyed Si-implanted ohmic contacts for AlGaN/GaN high electron mobility transistors

Martin Kocan, F. Recht, Gilberto A. Umana Membreno, Matt Kilburn, Brett Nener, U.K. Mishra, Giacinta Parish

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)56-59
JournalSolid-State Electronics
Volume56
DOIs
Publication statusPublished - 2011

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