High resolution position monitoring of suspended MEMS towards biological and chemical sensors

Research output: Chapter in Book/Conference paperConference paper

Abstract

We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements. Copyright © 2014 Materials Research Society.
Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Place of PublicationUnited States of America
PublisherCambridge University Press
Pages9-14
Volume1659
ISBN (Print)02729172
DOIs
Publication statusPublished - 2014
Event2013 MRS Fall Meeting - Boston, United States
Duration: 1 Dec 20136 Dec 2013

Conference

Conference2013 MRS Fall Meeting
CountryUnited States
CityBoston
Period1/12/136/12/13

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