High resolution position monitoring of suspended MEMS towards biological and chemical sensors

Gino Putrino; Mariusz Martyniuk; Adrian Keating; John Dell; Lorenzo Faraone

doi:10.1557/opl.2014.98

High resolution position monitoring of suspended MEMS towards biological and chemical sensors

Gino Putrino, Mariusz Martyniuk, Adrian Keating, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Abstract

We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements. Copyright © 2014 Materials Research Society.

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings
Place of Publication	United States of America
Publisher	Cambridge University Press
Pages	9-14
Volume	1659
ISBN (Print)	02729172
DOIs	https://doi.org/10.1557/opl.2014.98
Publication status	Published - 2014
Event	2013 MRS Fall Meeting - Boston, United States Duration: 1 Dec 2013 → 6 Dec 2013

Conference

Conference	2013 MRS Fall Meeting
Country/Territory	United States
City	Boston
Period	1/12/13 → 6/12/13

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10.1557/opl.2014.98

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@inproceedings{71d3f9eeb8204f17a178c0e3ee1d83c0,

title = "High resolution position monitoring of suspended MEMS towards biological and chemical sensors",

abstract = "We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements. Copyright {\textcopyright} 2014 Materials Research Society.",

author = "Gino Putrino and Mariusz Martyniuk and Adrian Keating and John Dell and Lorenzo Faraone",

year = "2014",

doi = "10.1557/opl.2014.98",

language = "English",

isbn = "02729172",

volume = "1659",

pages = "9--14",

booktitle = "Materials Research Society Symposium Proceedings",

publisher = "Cambridge University Press",

address = "United Kingdom",

note = "2013 MRS Fall Meeting ; Conference date: 01-12-2013 Through 06-12-2013",

}

Putrino, G, Martyniuk, M , Keating, A , Dell, J & Faraone, L 2014, High resolution position monitoring of suspended MEMS towards biological and chemical sensors. in Materials Research Society Symposium Proceedings. vol. 1659, Cambridge University Press, United States of America, pp. 9-14, 2013 MRS Fall Meeting, Boston, United States, 1/12/13. https://doi.org/10.1557/opl.2014.98

TY - GEN

T1 - High resolution position monitoring of suspended MEMS towards biological and chemical sensors

AU - Putrino, Gino

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2014

Y1 - 2014

N2 - We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements. Copyright © 2014 Materials Research Society.

AB - We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements. Copyright © 2014 Materials Research Society.

U2 - 10.1557/opl.2014.98

DO - 10.1557/opl.2014.98

M3 - Conference paper

SN - 02729172

VL - 1659

SP - 9

EP - 14

BT - Materials Research Society Symposium Proceedings

PB - Cambridge University Press

CY - United States of America

T2 - 2013 MRS Fall Meeting

Y2 - 1 December 2013 through 6 December 2013

ER -

High resolution position monitoring of suspended MEMS towards biological and chemical sensors

Abstract

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